Sinterização de filmes finos de LiNbO3 em forno microondas: estudo da influência da direção do fluxo de calor
Data
2004-06-01
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Editor
Associação Brasileira de Cerâmica
Resumo
Filmes finos de LiNbO3 foram preparados pelo método dos precursores poliméricos e depositados por spin coating sobre substratos de safira (0001). Os filmes foram tratados em forno microondas doméstico a 400 ºC por 15 e 20 min. Um material com alta perda dielétrica (susceptor de SiC) foi usado para absorver energia das microondas e transformá-la em calor. Este calor foi transferido para o filme a fim de promover a sua cristalização. O susceptor foi posicionado acima do filme ou embaixo do substrato. Desta forma, a influência da direção do fluxo de calor na cristalização das amostras foi verificada. Os filmes foram caracterizados por difração de raios X, microscopia de força atômica e espectrofotometria (transmitância) na região UV-visível e o índice de refração foi determinado por elipsometria. O crescimento epitaxial foi observado para o filme com susceptor posicionado embaixo do substrato. Verificou-se que os grãos apresentaram crescimento aleatório quando o susceptor foi posicionado acima do filme. Os filmes apresentaram-se relativamente densos, homogêneos e lisos, com boas propriedades ópticas.
LiNbO3 thin films were prepared using a polymeric precursor solution deposited by spin coating on (0001) sapphire substrate. Heat treatment of the films was carried out in a microwave oven at 400 ºC for 15 and 20 min. A SiC susceptor (material with high dielectric loss) was used to absorb microwave energy and transfer the heat to the film in order to promote crystallization. The susceptor was placed above the film or below the substrate. Thus, the influence of the heat flux direction on the sample crystallization was verified. The films were characterized by X-ray diffraction, atomic force microscopy and spectrophotometry (transmittance) in the UV-Visible region and the refractive index was determined with an ellipsometer. The epitaxial growth was observed for the film with the susceptor placed below the substrate. Random growth was verified when the susceptor was placed above the film. The films were relatively dense, homogeneous and smooth with good optical properties.
LiNbO3 thin films were prepared using a polymeric precursor solution deposited by spin coating on (0001) sapphire substrate. Heat treatment of the films was carried out in a microwave oven at 400 ºC for 15 and 20 min. A SiC susceptor (material with high dielectric loss) was used to absorb microwave energy and transfer the heat to the film in order to promote crystallization. The susceptor was placed above the film or below the substrate. Thus, the influence of the heat flux direction on the sample crystallization was verified. The films were characterized by X-ray diffraction, atomic force microscopy and spectrophotometry (transmittance) in the UV-Visible region and the refractive index was determined with an ellipsometer. The epitaxial growth was observed for the film with the susceptor placed below the substrate. Random growth was verified when the susceptor was placed above the film. The films were relatively dense, homogeneous and smooth with good optical properties.
Descrição
Palavras-chave
filmes finos, LiNbO3, microondas, SiC, epitaxia, thin films, LiNbO3, microwave, SiC, epitaxy
Como citar
Cerâmica. Associação Brasileira de Cerâmica, v. 50, n. 314, p. 128-133, 2004.