Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders

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Data

2004-01-01

Autores

Brankovic, Z.
Brankovic, G.
Varela, José Arana [UNESP]

Título da Revista

ISSN da Revista

Título de Volume

Editor

Elsevier B.V.

Resumo

PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films. (C) 2003 Elsevier Ltd. All rights reserved.

Descrição

Palavras-chave

films, microstructure-final, PZT, suspension

Como citar

Journal of the European Ceramic Society. Oxford: Elsevier B.V., v. 24, n. 6, p. 1945-1948, 2004.