Plasma-deposition of Ag-containing polyethyleneoxide-like coatings
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Data
2000-03-01
Autores
Favia, Pietro
Vulpio, Michele
Marino, Rosamaria
D'Agostino, Riccardo
Mota, Rogério Pinto [UNESP]
Catalano, Massimo
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Resumo
Ag-containing polyethyleneoxide (FEO)-like thin films have been deposited in Radio Frequency Glow Discharges fed with vapors of diethyleneglycol-dimethyl-ether and argon. Proper experimental conditions have been utilized in order to fragment the monomer in the glow and, at the same time, sputter Ag from the silver RF cathode of the reactor, in a way that polyethyleneoxide(PEO)-like coatings with embedded Ag clusters have been deposited at the ground electrode. The composition of the coatings has been investigated by means of different techniques; the plasma process has been investigated by means of Actinometric Optical Emission Spectroscopy. A correlation has been found between the amount of silver embedded in the coatings and that sputtered in the discharge, monitored by actinometry, that could eventually be utilized to control in situ the deposition process.
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Palavras-chave
Argon, Composition, Emission spectroscopy, Ethers, Monomers, Plasma enhanced chemical vapor deposition, Polyethylene oxides, Silver, Sputter deposition, Thin films, Actinometric optical emission spectroscopy, Bacterial resistant, Non fouling, Polyethyleneoxide like coating, Radio frequency glow discharges, Plastic coatings
Como citar
Plasmas and Polymers, v. 5, n. 1, p. 1-14, 2000.