Structural and electrical properties of strontium barium niobate thin films crystallized by conventional furnace and rapid-thermal annealing process
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Strontium barium niobate (SBN) thin films were crystallized by conventional electric furnace annealing and by rapid-thermal annealing (RTA) at different temperatures. The average grain size of films was 70 nm and thickness around 500 nm. Using x-ray diffraction, we identified the presence of polycrystalline SBN phase for films annealed from 500 to 700 °C in both cases. Phases such as SrNb2O6 and BaNb2O6 were predominantly crystallized in films annealed at 500 °C, disappearing at higher temperatures. Dielectric and ferroelectric parameters obtained from films crystallized by conventional furnace and RTA presented essentially the same values.
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Crystallization, Electric furnaces, Metallorganic chemical vapor deposition, Permittivity, Rapid thermal annealing, Scanning electron microscopy, Strontium compounds, X ray diffraction analysis, Metallic ions, Thin films
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Inglês
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Journal of Materials Research, v. 16, n. 10, p. 3009-3013, 2001.
