Publicação: Temperature and stoichiometry effect on microstructural and ferroelectric properties of Pb(Zr1-xTix)O3 thin films prepared by chemical soulution deposition
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Lead zirconate titanate (PZT) solutions were prepared using a polymeric precursor method, Zr n-propoxide and Ti i-propoxide were used as starting materials with ethylene glycol and water as solvents. The PZT solution was spin-coated on Pt/Ti/SiO2/Si substrates, baked on a hot plate, and finally heat-treated in a tube furnace between 400 and 800°C. The surface morphology and grain size of the films were characterized by atomic force microscopy (AFM), using a tapping mode with amplitude modulation. The films, thermal annealed at temperatures higher than 500°C, exhibited a dense microstructure, without noticeable cracks or voids. Electrical properties were investigated as a function of composition and annealing temperature.
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Amplitude modulation, Annealing, Atomic force microscopy, Characterization, Composition, Ferroelectricity, Lead compounds, Microstructure, Organic solvents, Polyethylene glycols, Silica, Stoichiometry, Annealing temperatures, Dense microstructures, Electromechanical response, Thin films
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Inglês
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Ceramic Transactions, v. 150, p. 245-251.
