Preparação e caracterização óptica de filmes nanocristalinos de GaAs:H depositados por RF magnetron sputtering
Carregando...
Data
2007-09-19
Autores
Costa, Wangner Barbosa da [UNESP]
Título da Revista
ISSN da Revista
Título de Volume
Editor
Universidade Estadual Paulista (Unesp)
Resumo
Filmes nanocristalinos e amorfos de GaAs tem recentemente chamado a atenção de vários grupos de pesquisa devido as suas possíveis aplicações em novos dispositivos ópticos e eletrônicos. Igualmente atraentes são as novas propriedades físicas relacionadas com a estrutura nanocristalina e os efeitos da desordem na estrutura eletrônicas destes materiais. Entre as aplicações existentes, podemos citar o uso destes filmes como camadas anti-guia em lasers com emissão perpendicular à superfície, as camadas “buffer” em hetero-epitaxias de GaAs sobre Si, e os filtros interferométricos para a região do infravermelho. A preparação e a caracterização de filmes nanocristalinos de GaAs hidrogenados e não hidrogenados usando a técnica de RF magnetron sputtering foram focalizados neste trabalho. Um alvo de GaAs e uma atmosfera controlada contendo quantidades variáveis de argônio (Ar) e hidrogênio (H2) foram usadas na deposição do filme. Foi investigada a influência do fluxo de Ar e H2 na composição, estrutura e propriedades ópticas dos filmes. A influência da temperatura de substrato e potência de deposição também foi analisada. As técnicas de difração de raios-X e análise da energia de dispersão por emissão de raios-X (EDX), foram utilizadas na análise da estrutura e composição do filme, enquanto medidas ópticas de transmitância e refletância permitiram a determinação do coeficiente de absorção óptica e índice de refração dos filmes. A presença de ligações de hidrogênio nos filmes foi confirmada pelas bandas de absorção do Ga-H e As-H usando um espectrofotômetro de transformada de Fourier (FTIR). Os resultados mostram que a microestrutura, a composição e as propriedades ópticas do material são fortemente influenciadas por todos os parâmetros investigados, com destaque para o fluxo de hidrogênio utilizado nas deposições...
The nanocrystalline and amorphous GaAs films are recently attracting the attention of several research groups due to their possible application in new electronic and optical devices. Also attractive are the new physical properties related to the nanocrystalline structure and the effects of disorder in the electronic structure of these materials. Among the existing applications we can mention the use of these films as antiguide layers in surface emitting lasers, as buffer layers in the GaAs hetero-epitaxy onto Si substrates, and as infrared interferometric filters. The preparation and characterization of hydrogenated and non-hydrogenated nanocrystalline GaAs films using the RF magnetron sputtering technique were focused here. An electronic grade GaAs water target and an atmosphere composed of variable amounts of Ar and 'H IND.2' were used in the film depositions. We have investigated the influence of Ar and 'H IND.2' fluxes on composition, structure, and optical properties of the films. The influence of substrate temperature and deposition power were also analyzed. X-ray diffraction and energy dispersive electron analysis (EDX) were used in the analysis of the film structure and composition, while optical transmittance and reflectance measurements allowed the determination of the optical absorption coefficient and refractive index of the films. The presence of bonded hydrogen in the films was confirmed by the Ga-H and As-H absorption bands using Fourier transform infrared spectra (FTIR). The results show that the microstructure, the composition, and the optical properties of the material are strongly influenced by all the investigated parameters, in special the hydrogen flux used in the depositions. The hydrogenated films ('H IND.2' flux of 3.0 sccm / Ar flux of 20.0 sccm) produced at relatively low power (30W) and substrate temperature (60ºC), have presented the widest... (Complete abstract click electronic access below)
The nanocrystalline and amorphous GaAs films are recently attracting the attention of several research groups due to their possible application in new electronic and optical devices. Also attractive are the new physical properties related to the nanocrystalline structure and the effects of disorder in the electronic structure of these materials. Among the existing applications we can mention the use of these films as antiguide layers in surface emitting lasers, as buffer layers in the GaAs hetero-epitaxy onto Si substrates, and as infrared interferometric filters. The preparation and characterization of hydrogenated and non-hydrogenated nanocrystalline GaAs films using the RF magnetron sputtering technique were focused here. An electronic grade GaAs water target and an atmosphere composed of variable amounts of Ar and 'H IND.2' were used in the film depositions. We have investigated the influence of Ar and 'H IND.2' fluxes on composition, structure, and optical properties of the films. The influence of substrate temperature and deposition power were also analyzed. X-ray diffraction and energy dispersive electron analysis (EDX) were used in the analysis of the film structure and composition, while optical transmittance and reflectance measurements allowed the determination of the optical absorption coefficient and refractive index of the films. The presence of bonded hydrogen in the films was confirmed by the Ga-H and As-H absorption bands using Fourier transform infrared spectra (FTIR). The results show that the microstructure, the composition, and the optical properties of the material are strongly influenced by all the investigated parameters, in special the hydrogen flux used in the depositions. The hydrogenated films ('H IND.2' flux of 3.0 sccm / Ar flux of 20.0 sccm) produced at relatively low power (30W) and substrate temperature (60ºC), have presented the widest... (Complete abstract click electronic access below)
Descrição
Palavras-chave
Crepitação (Fisica), Nanocristalino, Propriedades ópticas, Sputtering, Nanocrystalline, Optical properties
Como citar
COSTA, Wangner Barbosa da. Preparação e caracterização óptica de filmes nanocristalinos de GaAs:H depositados por RF magnetron sputtering. 2007. 79 f. Dissertação (mestrado) - Universidade Estadual Paulista, Faculdade de Ciências de Bauru, 2007.