AN ACTINOMETRIC STUDY OF C2H2 PLASMA POLYMERIZATION AND FILM PROPERTIES

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dc.alternative0000-0002-4511-3768[3]
dc.contributor.authorMota, Rogério Pinto [UNESP]
dc.contributor.authorShiosawa, T.
dc.contributor.authorDurrant, S. F.
dc.contributor.authorDemoraes, MAB
dc.contributor.institutionUniversidade Estadual de Campinas (UNICAMP)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-20T15:26:31Z
dc.date.available2014-05-20T15:26:31Z
dc.date.issued1995-11-01
dc.description.abstractThin polymer films were grown in radio frequency discharges containing C2H2. Actinometry revealed the trend in the plasma concentration of the CH species as a function of the operating pressure. The C-H bond density in the films, revealed by infrared analysis, was found to increase with the pressure of C2H2 in a similar way to that of the concentration of the CH species in the discharge. From transmission ultraviolet-visible spectroscopy data, optical parameters of the polymers, namely, the refractive index and the optical gap, were calculated. For the range of pressure studied, the refractive index decreased from 1.73 to 1.63 and the optical gap increased from 2.4 to 3.3 eV. Finally, measurements of the residual stress of the polymer films were carried out by the bending beam method, using a He-Ne laser, yielding values from 0.05 to 0.3 GPa. (C) 1995 American Vacuum Society.en
dc.description.affiliationUNICAMP,INST FIS GLEB WATAGHIN,BR-13083970 CAMPINAS,SP,BRAZIL
dc.format.extent2747-2752
dc.identifierhttp://dx.doi.org/10.1116/1.579699
dc.identifier.citationJournal of Vacuum Science & Technology A-vacuum Surfaces and Films. Woodbury: Amer Inst Physics, v. 13, n. 6, p. 2747-2752, 1995.
dc.identifier.doi10.1116/1.579699
dc.identifier.fileWOSA1995TF11100016.pdf
dc.identifier.issn0734-2101
dc.identifier.orcid0000-0002-4511-3768
dc.identifier.urihttp://hdl.handle.net/11449/36674
dc.identifier.wosWOS:A1995TF11100016
dc.language.isoeng
dc.publisherAmerican Institute of Physics (AIP)
dc.relation.ispartofJournal of Vacuum Science & Technology A-vacuum Surfaces and Films
dc.relation.ispartofjcr1.761
dc.relation.ispartofsjr0,520
dc.rights.accessRightsAcesso restrito
dc.sourceWeb of Science
dc.titleAN ACTINOMETRIC STUDY OF C2H2 PLASMA POLYMERIZATION AND FILM PROPERTIESen
dc.typeArtigo
dcterms.licensehttp://publishing.aip.org/authors/web-posting-guidelines
dcterms.rightsHolderAmer Inst Physics
unesp.campusUniversidade Estadual Paulista (Unesp), Faculdade de Engenharia, Guaratinguetápt

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Artigos - Física e Química - FEG