The valuable role of renucleation rate in ultrananocrystalline diamond growth

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dc.contributor.authorBarbosa, D. C.
dc.contributor.authorHammer, Peter [UNESP]
dc.contributor.authorTrava-Airoldi, V. J.
dc.contributor.authorCorat, E. J.
dc.contributor.institutionInstituto Nacional de Pesquisas Espaciais (INPE)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-20T15:33:28Z
dc.date.available2014-05-20T15:33:28Z
dc.date.issued2012-03-01
dc.description.abstractThis is a comprehensive study of the ultrananocrystalline diamond renucleation rate. The films deposited in a hot-filament chemical vapor deposition system (HFCVD) used an argon rich environment (90 vol.%), known as ideal for ultrananocrystalline diamond deposition. Substrate temperature (750 degrees C), total pressure (30 Tort) argon flow rate (180 seem) were constant in all experiments. Methane concentrations of 0.25, 0.5, 1, 1.5 and 2 vol.% balanced with hydrogen to a total flow rate of 20 sccm. Scanning electron microscopy (SEM) let morphology inspection. Visible-Raman scattering leaded to estimating relative influence of sp(2) bonds. X-ray photoelectron spectroscopy (XPS) measured the chemical bonds distribution. X-ray diffraction assessed crystallinity and diamond renucleation rates. The increase in methane content in the gas mixture promotes morphology changes from micro (faceted), to nano (cauliflower), and to ultrananocrystalline (ballas-like) diamond. It reaches a lamellar graphitic structure at the higher methane concentration. This transition is concurrent with: a decrease of film specific mass, an increase of diamond renucleation rate, an increase of sp(2) phase content, as seen by Raman spectroscopy and, an increase of C-H bond associated with C-C bond, as measured by x-ray photoelectron spectroscopy. Renucleation shows up as a very important process that presents a quadratic correlation with [CH4] in the feed gas. This new result may help bridging MCD, NCD and UNCD into a single understanding of diamond growth. Crown Copyright (C) 2012 Published by Elsevier B.V. All rights reserved.en
dc.description.affiliationINPE, MCT, LAS, BR-12227010 Sao Jose Dos Campos, SP, Brazil
dc.description.affiliationSão Paulo State Univ, UNESP, Inst Chem, BR-14801970 Araraquara, SP, Brazil
dc.description.affiliationUnespSão Paulo State Univ, UNESP, Inst Chem, BR-14801970 Araraquara, SP, Brazil
dc.description.sponsorshipCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.description.sponsorshipFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.description.sponsorshipIdCAPES: 02491/09-5
dc.description.sponsorshipIdFAPESP: 07/00013-4
dc.format.extent112-119
dc.identifierhttp://dx.doi.org/10.1016/j.diamond.2012.01.028
dc.identifier.citationDiamond and Related Materials. Lausanne: Elsevier B.V. Sa, v. 23, p. 112-119, 2012.
dc.identifier.doi10.1016/j.diamond.2012.01.028
dc.identifier.issn0925-9635
dc.identifier.lattes6466841023506131
dc.identifier.orcid0000-0002-3823-0050
dc.identifier.urihttp://hdl.handle.net/11449/42078
dc.identifier.wosWOS:000302887600021
dc.language.isoeng
dc.publisherElsevier B.V. Sa
dc.relation.ispartofDiamond and Related Materials
dc.relation.ispartofjcr2.232
dc.relation.ispartofsjr0,686
dc.rights.accessRightsAcesso restrito
dc.sourceWeb of Science
dc.subjectDiamond filmen
dc.subjectUltrananocrystallineen
dc.subjectRenucleationen
dc.subjectHot filament CVDen
dc.titleThe valuable role of renucleation rate in ultrananocrystalline diamond growthen
dc.typeArtigo
dcterms.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
dcterms.rightsHolderElsevier B.V. Sa
unesp.author.lattes6466841023506131(2)
unesp.author.orcid0000-0002-3823-0050(2)
unesp.campusUniversidade Estadual Paulista (Unesp), Instituto de Química, Araraquarapt

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