Thin polymer films prepared by plasma immersion ion implantation and deposition

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dc.contributor.authorRangel, E. C.
dc.contributor.authorSilva, PAF
dc.contributor.authorMota, Rogério Pinto [UNESP]
dc.contributor.authorSchreiner, W. H.
dc.contributor.authorCruz, N. C.
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.contributor.institutionUniversidade Federal do Paraná (UFPR)
dc.date.accessioned2014-05-20T13:27:35Z
dc.date.available2014-05-20T13:27:35Z
dc.date.issued2005-02-14
dc.description.abstractThis work describes an investigation of the properties of polymer films prepared by plasma immersion ion implantation and deposition. Films were synthesized from low pressure benzene glow discharges, biasing the samples with 25 W negative pulses. The total energy deposited in the growing layer was varied tailoring simultaneously pulse frequency and duty cycle. The effect of the pulse characteristics on the chemical composition and mechanical properties of the films was studied by X-ray photoelectron spectroscopy (XPS) and nanoindentation, respectively. Analysis of the deconvoluted C 1s XPS peaks demonstrated that oxygen was incorporated in all the samples. The chemical modifications induced structural reorganization, characterized by chain cross-linking and unsaturation, affecting material properties. Hardness and plastic resistance parameter increased under certain bombardment conditions. An interpretation is proposed in terms of the total energy delivered to the growing layer. (C) 2004 Elsevier B.V. All rights reserved.en
dc.description.affiliationUNESP, Lab Plasmas Tecnol, Unidade Diferenciada Sorocaba Ipero, BR-18087180 Sorocaba, Brazil
dc.description.affiliationUNESP, Dept Fis & Quim, Lab Plasmas, BR-12516180 Guaratingueta, SP, Brazil
dc.description.affiliationUFPR, Dept Fis, Lab Superficies & Interfaces, BR-81531990 Curitiba, Parana, Brazil
dc.description.affiliationUnespUNESP, Lab Plasmas Tecnol, Unidade Diferenciada Sorocaba Ipero, BR-18087180 Sorocaba, Brazil
dc.description.affiliationUnespUNESP, Dept Fis & Quim, Lab Plasmas, BR-12516180 Guaratingueta, SP, Brazil
dc.format.extent259-266
dc.identifierhttp://dx.doi.org/10.1016/j.tsf.2004.07.078
dc.identifier.citationThin Solid Films. Lausanne: Elsevier B.V. Sa, v. 473, n. 2, p. 259-266, 2005.
dc.identifier.doi10.1016/j.tsf.2004.07.078
dc.identifier.issn0040-6090
dc.identifier.urihttp://hdl.handle.net/11449/9110
dc.identifier.wosWOS:000226169800015
dc.language.isoeng
dc.publisherElsevier B.V.
dc.relation.ispartofThin Solid Films
dc.relation.ispartofjcr1.939
dc.relation.ispartofsjr0,617
dc.rights.accessRightsAcesso restrito
dc.sourceWeb of Science
dc.subjectplasma immersion ion implantation and depositionpt
dc.subjectmechanical propertiespt
dc.subjectchemical compositionpt
dc.titleThin polymer films prepared by plasma immersion ion implantation and depositionen
dc.typeArtigo
dcterms.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
dcterms.rightsHolderElsevier B.V.
unesp.campusUniversidade Estadual Paulista (Unesp), Faculdade de Engenharia, Guaratinguetápt

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Artigos - Física e Química - FEG