Control instability applied to a micro electro mechanical actuator system (mems)
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Abstract
MicroElectroMechanical Systems (MEMS) are devices what have been considered the technology of the future, being used in too many areas. MEMS are a combination of microstructures, micro sensors and micro actuators. The purpose of this work is to reduce the chaotic movement of the micro-actuator electrostatic to a small periodic orbit using the linear optimal control technique. The simulation results show that this technical is very effective.
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Keywords
Actuator, Chaos, Linear optimal control, MicroElectroMechanical System
Language
English
Citation
Advanced Materials Research, v. 1025-1026, p. 1164-1167.
