Publicação: Influence of heat treatment on LiNbO3 thin films prepared on Si(111) by the polymeric precursor method
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The effects of heat-treatment temperature on LiNbO3 thin films prepared by the polymeric precursor method were investigated. The precursor solution was deposited on Si(111) substrates by dip coating. X-ray diffraction and thermal analyses revealed that the crystallization process occurred at a low temperature (420 °C) and led to films with no preferential orientation. High-temperature treatments promoted formation of the LiNb3O8 phase. Scanning electron microscopy, coupled with energy dispersive spectroscopy analyses, showed that the treatment temperature also affected the film microstructure. The surface texture - homogeneous, smooth, and pore-free at low temperature - turned into an `islandlike' microstructure for high-temperature treatments.
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Crystal microstructure, Crystal orientation, Crystallization, Ferroelectric materials, Film preparation, Heat treatment, Lithium niobate, Piezoelectric materials, Silicon wafers, Surface structure, Thermal effects, Thin films, Polymeric precursor method, Dielectric films
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Inglês
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Journal of Materials Research, v. 14, n. 7, p. 3115-3121, 1999.
