Publication: Effects of the atmosphere and substrate on the crystallization of PLZT thin films
Loading...
Date
Advisor
Coadvisor
Graduate program
Undergraduate course
Journal Title
Journal ISSN
Volume Title
Publisher
ABM, ABC, ABPol
Type
Article
Access right
Acesso aberto
Abstract
Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.
Description
Keywords
PLZT, Pechini method, dip-coating, crystallization
Language
English
Citation
Materials Research. São Carlos, SP, Brazil: ABM, ABC, ABPol, v. 3, n. 3, p. 68-73, 2000.
