Efeito do tratamento de oxidação a plasma na produção de uma bicamada SiOx/SiOxCyHz
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Data
2017-08-16
Autores
Ribeiro, Rafael Parra
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Universidade Estadual Paulista (Unesp)
Resumo
Devido às suas propriedades mecânicas, soldabilidade e baixo custo, o aço carbono é um material amplamente utilizado nos mais diversos setores. Entretanto, o aço carbono é facilmente oxidado quando exposto ao ambiente. Para evitar esse problema, alguns trabalhos sugerem o desenvolvimento de revestimentos protetivos utilizando técnicas de deposição a plasma baseadas no composto hexametildisiloxano, HMDSO. A partir deste composto podese obter desde estruturas organosilicones até as inorgânicas pela alteração dos parâmetros de deposição. Revestimentos tipo óxido de silício são mais resistentes à corrosão que os organosilicones, porém sua estabilidade física é menor. Com o objetivo de associar as propriedades favoráveis de ambos os tipos de revestimentos, investigou-se, no presente trabalho, a possibilidade de revestir o aço carbono com sistemas bicamadas SiOx/SiOxCyHz através da combinação de metodologia de deposição e oxidação em plasmas de baixa pressão. Para tanto, filmes do tipo SiOxCyHz foram depositados a plasma de mistura de HMDSO (70%), O2 (20%) e Ar (10%) excitado por radiofrequência (150 W). A pressão total da atmosfera de deposição foi de 20 Pa. Os filmes foram depositados por 30 min e, posteriormente, expostos a plasmas de O2 (3,3 Pa, 10-300 W, 60 min) com o objetivo de criar uma camada superficial inorgânica. Foram investigados os efeitos da potência de excitação do plasma de O2 na espessura de camada, estrutura química e composição elementar das amostras. Avaliou-se também o efeito da potência do plasma de oxidação nas propriedades de barreira do revestimento depositado sobre aço carbono. Filmes como-depositados foram caracterizados como organosilicones. A exposição ao plasma de oxigênio foi observada remover hidrogênio, carbono e grupos metil da estrutura transformando-a em óxido de silício, sendo, todavia, o grau de conversão e a espessura da camada convertida fortemente dependentes da potência do plasma de oxidação. A resistência do sistema preparado sobre o aço carbono à corrosão foi observada depender da espessura final da camada e também da conectividade da estrutura convertida em sílica mais que do grau de conversão. A condição de tratamento eleita como ótima neste trabalho foi a conduzida com 50 W de potência por criar uma camada superficial inorgânica fina, compacta, com uma estrutura superficial similar a da sílica além de preservar a espessura do filme e aumentar as propriedades de barreira do sistema.
Due to its mechanical properties, welding and low cost, carbon steel is a material widely used in several sectors. However, carbon steel is easily oxidized when exposed to the environment. To avoid this problem, some work suggests the development of protective coating using plasma deposition techniques based on the compound hexamethyldisiloxane, HMDSO. From this compound it is possible to obtain from organosilicones structures to inorganic by changing the parameters of deposition. Silicon oxide type coatings are more resistant to corrosion than organosilicones, but their physical stability is lower. With the objective of associating the favorable properties of both types of coatings, the present work investigated the possibility of coating the carbon steel with SiOx/SiOxCyHz bilayer systems through the combination of deposition and oxidation methodology in low pressure plasmas. For that, SiOxCyHz films were deposited in a mixture plasma of HMDSO (70%), O2 (20%) and Ar (10%) excited by radiofrequency (150 W). The total pressure of the atmosphere of deposition was 20 Pa. The films were deposited for 30 min and subsequently exposed to O2 plasmas (3.3 Pa, 10-300 W, 60 min) to create an inorganic surface layer. The effects of the excitation power of the O2 plasma on the layer thickness, chemical structure and elemental composition of the samples were investigated. The effect of the oxidation plasma power was also evaluated in the barrier properties of the coating deposited on carbon steel. As-deposited films were characterized as organosilicones. Exposure to oxygen plasma was observed to remove hydrogen, carbon and methyl groups from the structure transforming it into a silicon oxide, however, the degree of conversion and the thickness of the converted layer is strongly dependent on the power of the oxidation plasma. The corrosion resistance of the system prepared on carbon steel was observed to depend on the final thickness of the layer and also on the connectivity of the structure converted to silica rather than the degree of conversion. The treatment condition chosen as optimal in this work was the one conducted with 50 W of power by creating a thin, compact, inorganic surface layer with a silica-like surface structure in addition to preserving the film thickness and increasing the barrier properties of the system.
Due to its mechanical properties, welding and low cost, carbon steel is a material widely used in several sectors. However, carbon steel is easily oxidized when exposed to the environment. To avoid this problem, some work suggests the development of protective coating using plasma deposition techniques based on the compound hexamethyldisiloxane, HMDSO. From this compound it is possible to obtain from organosilicones structures to inorganic by changing the parameters of deposition. Silicon oxide type coatings are more resistant to corrosion than organosilicones, but their physical stability is lower. With the objective of associating the favorable properties of both types of coatings, the present work investigated the possibility of coating the carbon steel with SiOx/SiOxCyHz bilayer systems through the combination of deposition and oxidation methodology in low pressure plasmas. For that, SiOxCyHz films were deposited in a mixture plasma of HMDSO (70%), O2 (20%) and Ar (10%) excited by radiofrequency (150 W). The total pressure of the atmosphere of deposition was 20 Pa. The films were deposited for 30 min and subsequently exposed to O2 plasmas (3.3 Pa, 10-300 W, 60 min) to create an inorganic surface layer. The effects of the excitation power of the O2 plasma on the layer thickness, chemical structure and elemental composition of the samples were investigated. The effect of the oxidation plasma power was also evaluated in the barrier properties of the coating deposited on carbon steel. As-deposited films were characterized as organosilicones. Exposure to oxygen plasma was observed to remove hydrogen, carbon and methyl groups from the structure transforming it into a silicon oxide, however, the degree of conversion and the thickness of the converted layer is strongly dependent on the power of the oxidation plasma. The corrosion resistance of the system prepared on carbon steel was observed to depend on the final thickness of the layer and also on the connectivity of the structure converted to silica rather than the degree of conversion. The treatment condition chosen as optimal in this work was the one conducted with 50 W of power by creating a thin, compact, inorganic surface layer with a silica-like surface structure in addition to preserving the film thickness and increasing the barrier properties of the system.
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Palavras-chave
Aço carbono, Resistência à corrosão, SiOxCyHz, SiOx, PECVD, Oxidação a plasma, Carbon steel, Corrosion resistance, Plasma oxidation