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dc.contributor.authorFreschi, A. A.
dc.contributor.authordos Santos, F. J.
dc.contributor.authorRigon, E. L.
dc.contributor.authorCescato, L.
dc.date.accessioned2014-05-20T15:21:30Z
dc.date.available2014-05-20T15:21:30Z
dc.date.issued2002-07-01
dc.identifierhttp://dx.doi.org/10.1016/S0030-4018(02)01571-7
dc.identifier.citationOptics Communications. Amsterdam: Elsevier B.V., v. 208, n. 1-3, p. 41-49, 2002.
dc.identifier.issn0030-4018
dc.identifier.urihttp://hdl.handle.net/11449/32631
dc.description.abstractThe superposition of optical interference patterns in a photoresist film can produce a rich variety of diffractive structures. In particular, a periodic non-sinusoidal surface relief profile can be synthesized by adding the Fourier components (sinusoidal gratings) of the desired profile. In order to control the shape of the grooves it is very important an accurate adjustment of the relative spatial shift between the recorded sinusoidal components. We describe the implementation of an opto-electronic feedback loop to select and lock such spatial shift at any desired position, thus allowing the synthesis of structures varying from symmetrical to asymmetrical relief profiles in a continuous range. To demonstrate the feasibility of the technique, the Fourier synthesis of two spatial harmonics is accomplished. The superposed sinusoidal gratings were recorded in positive photoresist films using a holographic setup operating at the line lambda = 457.9 run of an argon-ion laser. A detailed description of the procedure as well as the resulting profiles recorded in the photoresist is presented. (C) 2002 Elsevier B.V. B.V. All rights reserved.en
dc.format.extent41-49
dc.language.isoeng
dc.publisherElsevier B.V.
dc.relation.ispartofOptics Communications
dc.sourceWeb of Science
dc.titlePhase-locking of superimposed diffractive gratings in photoresistsen
dc.typeArtigo
dcterms.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
dcterms.rightsHolderElsevier B.V.
dc.contributor.institutionUniversidade Estadual Paulista (UNESP)
dc.contributor.institutionUniversidade Estadual de Campinas (UNICAMP)
dc.description.affiliationUNESP, Dept Fis, IGCE, BR-13500970 Rio Claro, SP, Brazil
dc.description.affiliationUNICAMP, Lab Opt, IFGW, BR-13083970 Campinas, SP, Brazil
dc.description.affiliationUnespUNESP, Dept Fis, IGCE, BR-13500970 Rio Claro, SP, Brazil
dc.identifier.doi10.1016/S0030-4018(02)01571-7
dc.identifier.wosWOS:000176767400006
dc.rights.accessRightsAcesso restrito
unesp.campusUniversidade Estadual Paulista (UNESP), Instituto de Geociências e Ciências Exatas, Rio Claropt
dc.identifier.lattes7543844121597556
unesp.author.lattes7543844121597556
unesp.author.orcid0000-0003-1494-0063[1]
dc.relation.ispartofjcr1.887
dc.relation.ispartofsjr0,614
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