The gas flow rate increase obtained by an oscillating piezoelectric actuator on a micronozzle
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Data
2008-05-28
Autores
Wiederkehr, R. S.
Salvadori, M. C.
Brugger, J.
Degasperi, F. T.
Cattani, M.
Título da Revista
ISSN da Revista
Título de Volume
Editor
Elsevier B.V. Sa
Resumo
Micronozzles with piezoelectric actuator were fabricated and investigated. The micronozzles were fabricated in glass substrates using a powder-blasting technique, and the actuator is a bimorph structure made from a piezoelectric polymer. The actuator was located at the nozzle outlet, and was driven in an oscillating mode by applying an alternating voltage across the actuator electrodes. With a pressure difference between inlet and outlet, the gas flow rate through the device was increased. This effect was quantified, and compared to a similar micronozzle with no actuator. The increase in the flow rate was defined as the gas flow through the micronozzle with actuator oscillating minus the gas flow without actuator, was found to depend on the inlet pressure, the pressure ratio, and the nozzle throat diameter. (C) 2008 Elsevier B.V. All rights reserved.
Descrição
Palavras-chave
microfluidics, micronozzle, piezoelectric microactuator, poly(vinylidene fluoride), glass micromachining
Como citar
Sensors and Actuators A-physical. Lausanne: Elsevier B.V. Sa, v. 144, n. 1, p. 154-160, 2008.