Caracterização topográfica e estrutural de filmes poliméricos provenientes de acetileno (C2H2) depositados a plasma sobre substratos lisos e rugosos
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Data
2003-11
Autores
Teixeira, Ana Paula Gonçalves da Cruz [UNESP]
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Editor
Universidade Estadual Paulista (Unesp)
Resumo
Filmes poliméricos obtidos ou processados a plasma têm sido objeto de muita pesquisa, devido às suas características peculiares que os tornam promissores e por vezes únicos em diversas aplicações tecnológicas e industriais. Este trabalho apresenta os resultados de um estudo que objetiva a investigação da evolução temporal do perfil topográfico de superfície de filmes produzidos por processos a plasma a partir do Acetileno. São apresentados resultados sobre a estrutura molecular e propriedades como rugosidade e molhabilidade dos filmes poliméricos. O experimento foi realizado num reator a plasma, cilíndrico de pyrex, excitado indutivamente por rádio-freqüência. O plasma foi gerado a partir do monômero Acetileno numa pressão de 100mTorr, excitado por uma rádio-freqüência (13,56MHz) à 35W de potência. Deposições foram realizadas sobre substratos de InP com dois tipos de perfis de superfície: com padrão bem definido e sem definição. Para caracterização dos filmes foram utilizadas diferentes técnicas de diagnósticos: espectroscopia infravermelha para o estudo da estrutura molecular, medida de ângulo de contato e energia de superfície através de um goniômetro e microscopia de força atômica (AFM) para o estudo de topografia de superfície dos filmes. Os resultados indicaram que a estrutura dos filmes permaneceu constante independente do tempo de deposição. O caráter hidrofílico dos filmes foi mantido ao longo do tempo, com o ângulo de contato medido em torno de 50º. A microscopia 15 (AFM) mostrou as estruturas nanométricas da superfície dos filmes e ainda a rugosidade e a espessura dos mesmos. A constância média no valor do ângulo de contato medido e a constância da estrutura química dos filmes sugerem que a rugosidade da superfície dos mesmos seja também constante. Esta influência é comprovada pelas imagens e... .
Considerable efforts have been made by the internacional community to study plasma polymeric films motivated by interesting features of these films in technological and industrial applications. The present work reports the investigation on the time evolution of topographic profile of the surface of films produced by plasma processing with Acetylene. The results on the study of molecular structure and properties such as roughness and wettability were reported as well. The experiment was performed in a cylindrical Pyrex plasma reactor in inductively coupled configuration. The plasma was generated in Acetylene at 100mTorr with a 35W power supply connected to a circular antenna around discharge tube. Depositions were performed on InP substrate with a well defined and undefined profile patternof the surface. To characterize the films, different techiniques were applied: Fourier Transform Infrared Spectroscopy to study molecular structure, goniometer to measure contact angle and surface energy and Atomic Force Microscopy (AFM) to study the topography of the films. The results indicated that the structure of the films were the same, i.e., independent of the time used to produce the film. High hydrophilic films were obtained with contact angle around 50º. The AFM showed the nanoscale structure of the films surfaces and values of film thickness as well. Approximate same value of contact angle and chemical strcture in the films suggested same roughness on its surface. This was conffirmated by observations with AFM. 17 The images of microscale structure of film surface shows that original topography of the substrate are reproduced on the film. In conclusion, polymeric thin films on the InP substrate produced with Acetylene plasma are hydrophilic for well defined and undefined profile pattern of substrate surface. They have also similar chemical... (Complete abstract, click electronic address below).
Considerable efforts have been made by the internacional community to study plasma polymeric films motivated by interesting features of these films in technological and industrial applications. The present work reports the investigation on the time evolution of topographic profile of the surface of films produced by plasma processing with Acetylene. The results on the study of molecular structure and properties such as roughness and wettability were reported as well. The experiment was performed in a cylindrical Pyrex plasma reactor in inductively coupled configuration. The plasma was generated in Acetylene at 100mTorr with a 35W power supply connected to a circular antenna around discharge tube. Depositions were performed on InP substrate with a well defined and undefined profile patternof the surface. To characterize the films, different techiniques were applied: Fourier Transform Infrared Spectroscopy to study molecular structure, goniometer to measure contact angle and surface energy and Atomic Force Microscopy (AFM) to study the topography of the films. The results indicated that the structure of the films were the same, i.e., independent of the time used to produce the film. High hydrophilic films were obtained with contact angle around 50º. The AFM showed the nanoscale structure of the films surfaces and values of film thickness as well. Approximate same value of contact angle and chemical strcture in the films suggested same roughness on its surface. This was conffirmated by observations with AFM. 17 The images of microscale structure of film surface shows that original topography of the substrate are reproduced on the film. In conclusion, polymeric thin films on the InP substrate produced with Acetylene plasma are hydrophilic for well defined and undefined profile pattern of substrate surface. They have also similar chemical... (Complete abstract, click electronic address below).
Descrição
Palavras-chave
Plasma (Gases ionizados), Espectroscopia de infravermelho, Física do plasma, Plasma, Topographic profile
Como citar
TEIXEIRA, Ana Paula Gonçalves da Cruz. Caracterização topográfica e estrutural de filmes poliméricos provenientes de acetileno (C2H2) depositados a plasma sobre substratos lisos e rugosos. 2003. 71 f. Dissertação (mestrado) - Universidade Estadual Paulista, Faculdade de Engenharia de Guaratinguetá, 2003.