Influence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin films

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dc.contributor.authorMartins, Denis E. [UNESP]
dc.contributor.authorGozzi, Giovani [UNESP]
dc.contributor.authorSantos, Lucas Fugikawa [UNESP]
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2018-12-11T17:36:42Z
dc.date.available2018-12-11T17:36:42Z
dc.date.issued2018-01-01
dc.description.abstractIn the current work, we evaluate the influence of the processing parameters on the electrical properties of aluminium zinc oxide (AZO) thin films produced by airbrush spray-pyrolysis deposition technique. Spray-deposited AZO thin-films were produced with Al:Zn molar ratios varying from 0 % (pure ZnO) up to 30 %, using aluminium acetate and zinc acetate as organic precursors and water as solvent. Thermogravimetric analysis (TGA) and infrared spectroscopy (FTIR-ATR) were used to monitor the metal-oxide formation from the organic precursors as a function of the temperature. The results show that a temperature of 400°C is necessary to completely degrade the organic phase and to obtain the desired inorganic metal-oxides films. The electrical properties of the TMOs were evaluated by d.c. current-voltage (I-V) analysis using planar thermally evaporated Al electrodes on top of the TMO layer, with different aspect ratios (1/18, 2/9, 5/13, 5/9 and 8/9). The lowest sheet resistance was obtained for AZO films at a molar Al concentration of 5 %. We also observed that, after carrying out a post-annealing treatment (30 mbar, 150°C) the samples presented a decrease on the sheet resistance superior to 60 %, in comparison to the samples before the treatment.en
dc.description.affiliationDepartamento de Física Universidade Estadual Paulista - UNESP, Avenida 24A, 1515
dc.description.affiliationDepartamento de Física Universidade Estadual Paulista - UNESP, Rua Cristovao Colombo 2265
dc.description.affiliationUnespDepartamento de Física Universidade Estadual Paulista - UNESP, Avenida 24A, 1515
dc.description.affiliationUnespDepartamento de Física Universidade Estadual Paulista - UNESP, Rua Cristovao Colombo 2265
dc.description.sponsorshipCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.description.sponsorshipFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.description.sponsorshipIdFAPESP: 2008/57706-4
dc.description.sponsorshipIdFAPESP: 2013/24461-7
dc.description.sponsorshipIdFAPESP: 2017/22018-0
dc.format.extent283-289
dc.identifierhttp://dx.doi.org/10.1557/adv.2018.121
dc.identifier.citationMRS Advances, v. 3, n. 5, p. 283-289, 2018.
dc.identifier.doi10.1557/adv.2018.121
dc.identifier.issn2059-8521
dc.identifier.lattes0101178832675166
dc.identifier.scopus2-s2.0-85045439691
dc.identifier.urihttp://hdl.handle.net/11449/179775
dc.language.isoeng
dc.relation.ispartofMRS Advances
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectoxide
dc.subjectspray pyrolysis
dc.subjectthin film
dc.titleInfluence of spray-pyrolysis deposition parameters on the electrical properties of aluminium zinc oxides thin filmsen
dc.typeTrabalho apresentado em evento
unesp.author.lattes0101178832675166[3]
unesp.author.orcid0000-0001-7376-2717[3]

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Artigos - Física - IBILCE