Publicação: Foundry produced SU-8 inverted-rib waveguide-based components
dc.contributor.author | Finardi, C. A. | |
dc.contributor.author | Carvalho, W. | |
dc.contributor.author | Zoldan, V. C. | |
dc.contributor.author | Panepucci, R. R. | |
dc.contributor.author | Malheiros-Silveira, G. N. [UNESP] | |
dc.contributor.institution | Centro de Tecnologia da Informa ão Renato Archer | |
dc.contributor.institution | CEITEC S.A Semiconductors | |
dc.contributor.institution | Universidade Estadual Paulista (Unesp) | |
dc.date.accessioned | 2021-06-25T10:13:03Z | |
dc.date.available | 2021-06-25T10:13:03Z | |
dc.date.issued | 2020-01-01 | |
dc.description.abstract | Photonic devices based on polymer waveguides have potential use because they can be fabricated by high-volume manufacturing techniques. These integrated photonic devices can potentially be applied to communications and sensing as they can be produced in a short cycle and at low cost. In this report, we present foundry fabrication of polymer-based photonic integrated circuits. The inverted-rib waveguide components are about 2 μm wide and 0.570 μm deep. Spincoated SU-8 polymer onto SiO2 is used to compose the guiding layer. In our preliminary results, we highlight the design, manufacturing, and characterization of microracetrack resonator notch filters. Those components were fabricated using complementary metal-oxide-semiconductor (CMOS) foundry process. Full wafers were processed at the foundry's 150 mm-facility. Compact micro racetrack resonators based on SU-8 polymer are demonstrated, presenting high coupling efficiency. Facet sidewall roughness was reduced in the chip dies using mechanical polishing processes. We believe these results are promising for applications ranging from telecommunication components to sensing applications at low cost. | en |
dc.description.affiliation | Centro de Tecnologia da Informa ão Renato Archer | |
dc.description.affiliation | CEITEC S.A Semiconductors | |
dc.description.affiliation | São Paulo State University (UNESP) Campus of São João da Boa Vista | |
dc.description.affiliationUnesp | São Paulo State University (UNESP) Campus of São João da Boa Vista | |
dc.identifier | http://dx.doi.org/10.1117/12.2568957 | |
dc.identifier.citation | Proceedings of SPIE - The International Society for Optical Engineering, v. 11487. | |
dc.identifier.doi | 10.1117/12.2568957 | |
dc.identifier.issn | 1996-756X | |
dc.identifier.issn | 0277-786X | |
dc.identifier.scopus | 2-s2.0-85092496841 | |
dc.identifier.uri | http://hdl.handle.net/11449/205299 | |
dc.language.iso | eng | |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | |
dc.source | Scopus | |
dc.subject | Integrated photonic | |
dc.subject | Inverted-rib waveguides | |
dc.subject | Photonics foundry | |
dc.subject | Polymer waveguides | |
dc.title | Foundry produced SU-8 inverted-rib waveguide-based components | en |
dc.type | Trabalho apresentado em evento | |
dspace.entity.type | Publication |