Control instability applied to a micro electro mechanical actuator system (mems)

De Conde, Kevin Eduardo [UNESP]Chavarette, Fábio Roberto [UNESP]2018-12-112018-12-112014-01-01Advanced Materials Research, v. 1025-1026, p. 1164-1167.1662-89851022-6680http://hdl.handle.net/11449/177268MicroElectroMechanical Systems (MEMS) are devices what have been considered the technology of the future, being used in too many areas. MEMS are a combination of microstructures, micro sensors and micro actuators. The purpose of this work is to reduce the chaotic movement of the micro-actuator electrostatic to a small periodic orbit using the linear optimal control technique. The simulation results show that this technical is very effective.1164-1167engActuatorChaosLinear optimal controlMicroElectroMechanical SystemControl instability applied to a micro electro mechanical actuator system (mems)Trabalho apresentado em evento10.4028/www.scientific.net/AMR.1025-1026.1164Acesso aberto2-s2.0-849135702852-s2.0-84913570285.pdf2-s2.0-84913570285.pdf