Rosa, A. M. [UNESP]Silva, E. P. da [UNESP]Amorim, E. [UNESP]Chaves, M. [UNESP]Catto, A. C.Lisboa Filho, Paulo Noronha [UNESP]Bortoleto, J. R. R. [UNESP]2014-05-202014-05-202012-01-0114th Latin American Workshop on Plasma Physics (lawpp 2011). Bristol: Iop Publishing Ltd, v. 370, p. 7, 2012.1742-6588http://hdl.handle.net/11449/8415We study the surface morphology evolution of ZnO thin films grown on glass substrates as a function of thickness by RF magnetron sputtering technique. The surface topography of the samples is measured by atomic force microscopy (AFM). All AFM images of the films are analyzed using scaling concepts. The results show that the surface morphology is initially formed by a small grains structure. The grains increase in size and height with growth time resulting in the formation of a mounds-like structure. The growth exponent, beta, and the exponent defining the evolution of the characteristic wavelength of the surface, p, amounted to beta = 0.76 +/- 0.08 and p = 0.3 +/- 0.05. From these exponents, the surface morphology is determined by the nonlocal shadowing effects, that is the dominant mechanism, due to the incident deposition particles during film growth.7engTrabalho apresentado em evento10.1088/1742-6596/370/1/012020WOS:000307752700020Acesso abertoWOS000307752700020.pdf135386241453200545992676701507190000-0002-7734-40694599267670150719