Almeida, G. F.B.Cardoso, M. R.Constantino, C. J.L. [UNESP]Aoki, P. H.B. [UNESP]Rodrigues, C. A.Lima, J. J.D.Costa, L. da F.Mendonça, C. R.2022-04-292022-04-292013-01-01Optics InfoBase Conference Papers.2162-2701http://hdl.handle.net/11449/228806We report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013.engTrabalho apresentado em evento10.1364/fio.2013.jw3a.332-s2.0-85085780473