Marcal, Luiz Antonio PereziLeao, Jose Vital FerrazNader, GilderHiguti, Ricardo Tokio [UNESP]Kitano, Claudio [UNESP]Silva, Emilio Carlos Nelli2014-05-202014-05-202007-06-01IEEE Transactions on Instrumentation and Measurement. Piscataway: IEEE-Inst Electrical Electronics Engineers Inc., v. 56, n. 3, p. 954-961, 2007.0018-9456http://hdl.handle.net/11449/130761Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J(1) - J(4) method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance.954-961engHomodyne optical interferometerNanometric displacement measurementPiezoelectric flextensional actuator (PFA)Artigo10.1109/TIM.2007.894173WOS:000246590800036Acesso restrito640533951088320328834403518951670000-0003-4201-56170000-0001-6320-755X