Simões, A. Z. [UNESP]Gonzalez, A. H. [UNESP]Zaghete, M. A. [UNESP]Stojanovic, B. D. [UNESP]Cavalheiro, A. A. [UNESP]Moeckli, P.Setter, N.Varela, José Arana [UNESP]2014-05-272014-05-272002-01-01Ferroelectrics, v. 271, p. 33-38.0015-01931563-5112http://hdl.handle.net/11449/66761Polymeric precursor solution (Pechini method) was used to deposit LiNbO 3 thin films by spin-coating on (100) silicon substrates. X-ray diffraction data of thin films showed that the increase of oxygen flow promotes a preferred orientation of (001) LiNbO 3 planes parallel to the substrate surface. Surface roughness and grain size, observed by atomic force microscopy, change also with oxygen flow. © 2002 Taylor & Francis.33-38engCrystallizationLiNbO 3Rietveld analysisLiNbO3Oxygen flowSubstrate surfaceAtomic force microscopyCrystalline materialsFlow of fluidsLithium niobateMorphologyOxygenSiliconSpin coatingThin filmsTrabalho apresentado em evento10.1080/00150190211491Acesso aberto2-s2.0-0141943464