Dielectric and ferroelectric properties of PZT and PT thin films for saw sensors applications
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Data
2004-12-01
Autores
Shibatta-Kagesawa, S. T. [UNESP]
Araújo, E. B. [UNESP]
Oki, N. [UNESP]
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Resumo
It is very important for the building of the SAW devices to study dielectric and ferroelectrics properties because every SAW device is based in piezoelectric effect that it is made up to transform an electric sign in the mechanical or acoustic sign and a mechanical or acoustic sign in an electric sign. Thus, the purpose of the present work is to prepare PbZr 0,53Ti0.47O3 (PZT) and PbTiO3 (PT) thin films on the Si (100) substrates across spin-coating using a chemical method based in polymeric precursors. After conventional treatment in the furnace, the films were characterized by impedance spectroscopy and hysteresis loops to know its dielectric and ferroelectric properties.
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Palavras-chave
Capacitors, Carboxylic acids, Ferroelectric materials, Lead compounds, Microsensors, Polyethylene glycols, Shear waves, Silicon, Solutions, Stoichiometry, Titanium compounds, Chemical methods, Hysteresis loops, Mechanical energy, Piezoelectric substrates, Thin films
Como citar
Proceedings - Electrochemical Society, v. 3, p. 319-324.