Double optical monitoring of time-dependent film formation

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dc.contributor.authorMichels, Alexandre F.
dc.contributor.authorMenegotto, Thiago
dc.contributor.authorGrieneisen, Hans Peter H.
dc.contributor.authorSantilli, Celso Valentim [UNESP]
dc.contributor.authorHorowitz, Flavio
dc.contributor.institutionUniversidade Federal do Rio Grande do Sul (UFRGS)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:21:46Z
dc.date.available2014-05-27T11:21:46Z
dc.date.issued2005-12-23
dc.description.abstractA brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.en
dc.description.affiliationInstituto de Física Universidade Federal do Rio Grande do Sul (UFRGS) Campus do Vale, CP15051, 91501-970 Porto Alegre, RS
dc.description.affiliationPrograma de Pós-Graduação em Microeletrônica (PGMicro) Universidade Federal do Rio Grande do Sul (UFRGS) Campus do Vale, CP15051, 91501-970 Porto Alegre, RS
dc.description.affiliationInstituto de Química Universidade Estadual de São Paulo (UNESP), 14800-900 Araraquara, SP
dc.description.affiliationUnespInstituto de Química Universidade Estadual de São Paulo (UNESP), 14800-900 Araraquara, SP
dc.format.extent1-6
dc.identifierhttp://dx.doi.org/10.1117/12.617967
dc.identifier.citationProceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.
dc.identifier.doi10.1117/12.617967
dc.identifier.issn0277-786X
dc.identifier.lattes5584298681870865
dc.identifier.orcid0000-0002-8356-8093
dc.identifier.scopus2-s2.0-29144506747
dc.identifier.urihttp://hdl.handle.net/11449/68697
dc.language.isoeng
dc.relation.ispartofProceedings of SPIE - The International Society for Optical Engineering
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectOptical properties
dc.subjectQuality control
dc.subjectReflection
dc.subjectRefractive index
dc.subjectOptical monitoring
dc.subjectPhysical thickness
dc.subjectPolarimetric measurements
dc.subjectThin films
dc.titleDouble optical monitoring of time-dependent film formationen
dc.typeTrabalho apresentado em evento
dcterms.licensehttp://proceedings.spiedigitallibrary.org/ss/TermsOfUse.aspx
unesp.author.lattes5584298681870865[4]
unesp.author.orcid0000-0002-8356-8093[4]
unesp.campusUniversidade Estadual Paulista (Unesp), Instituto de Química, Araraquarapt

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Artigos - Físico Química - IQ