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Influence of oxygen atmosphere on LiNbO3 thin films prepared by Pechini process
(Proceedings of the International Conference on Microelectronics, 2004-07-27) [Trabalho apresentado em evento]
Thin films of lithium niobate were deposited on the Pt/Ti/SiO2 (111) substrates by the polymeric precursor method (Pechini process). Annealing in static air and oxygen atmosphere was performed at 500°C for 3 hours. The ...