Material processing by plasma shock wave generated in an inverse Z-pinch plasma expander
| dc.contributor.author | Aramaki, E. A. | |
| dc.contributor.author | de Moraes, M. B. | |
| dc.contributor.author | Machida, M. | |
| dc.contributor.institution | Universidade Estadual Paulista (Unesp) | |
| dc.date.accessioned | 2014-05-20T13:27:38Z | |
| dc.date.available | 2014-05-20T13:27:38Z | |
| dc.date.issued | 2003-01-01 | |
| dc.description.abstract | The applicability of plasma shock wave for material processing was investigated using modified inverse Z-pinch device. Shock wave expanding speed and plasma spectral analysis were studied using an internal magnetic,probe and spatially collimated light spectroscopy. The material processing capability of the device was shown by many different surface analysis techniques such as AES, IRS, EPM and SEM. The interactions between a plasma shock wave of similar to4x10(6) cm/s speed with a Si substrate surface shows some ion implantation capability using a nitrogen plasma and thin film formation using a methane plasma. | en |
| dc.description.affiliation | Univ Estadual Paulista Julio Mesquita Filho, Fac Engn, Dept Quim & Fis, BR-12516410 Guaratingueta, SP, Brazil | |
| dc.description.affiliationUnesp | Univ Estadual Paulista Julio Mesquita Filho, Fac Engn, Dept Quim & Fis, BR-12516410 Guaratingueta, SP, Brazil | |
| dc.format.extent | 339-342 | |
| dc.identifier | http://dx.doi.org/10.1063/1.1593934 | |
| dc.identifier.citation | Plasma Physics. Melville: Amer Inst Physics, v. 669, p. 339-342, 2003. | |
| dc.identifier.dimensions | pub.1139486848 | |
| dc.identifier.doi | 10.1063/1.1593934 | |
| dc.identifier.issn | 0094-243X | |
| dc.identifier.issn | 1551-7616 | |
| dc.identifier.uri | http://hdl.handle.net/11449/9150 | |
| dc.identifier.wos | WOS:000184031800084 | |
| dc.language.iso | eng | |
| dc.publisher | American Institute of Physics (AIP) | |
| dc.publisher | AIP Publishing | |
| dc.relation.ispartof | Plasma Physics | |
| dc.rights.accessRights | Acesso aberto | pt |
| dc.source | Web of Science | |
| dc.source | Dimensions | |
| dc.title | Material processing by plasma shock wave generated in an inverse Z-pinch plasma expander | en |
| dc.type | Trabalho apresentado em evento | pt |
| dcterms.license | http://publishing.aip.org/authors/web-posting-guidelines | |
| dcterms.rightsHolder | Amer Inst Physics | |
| dspace.entity.type | Publication | |
| relation.isOrgUnitOfPublication | a4071986-4355-47c3-a5a3-bd4d1a966e4f | |
| relation.isOrgUnitOfPublication.latestForDiscovery | a4071986-4355-47c3-a5a3-bd4d1a966e4f | |
| unesp.campus | Universidade Estadual Paulista (UNESP), Faculdade de Engenharia, Guaratinguetá | pt |
| unesp.department | Física e Química - FEG | pt |