Nonlinear Dynamic Behavior, Deterministic Chaos and Nonlinear Control of a Micro Electro Mechanical Actuator System (MEMS)

Abstract

Micro Electro Mechanical Systems (MEMS) are systems composite by electrical and mechanical devices that interact by means of transducers elements, thus constituting one single and whole system. On the study of dynamic systems, nonlinear theory in recent years has occupied a prominent position in several areas of research because it unravels puzzles and offers responses, leads to the possibility of describing and explaining the behavior of various existing processes. Nonlinear systems have a tendency to develop motion with chaotic dynamics and, thus, presenting certain disadvantages when this dynamic condition happens, such as high power consumption and even poor performance. Thus, to work well, these systems often need to be controlled by appropriated methods of control. Many techniques for the synthesis of controllers for nonlinear systems have been developed. The goal in this work is applying two different techniques of non-linear control to the MEMS with unstable non-linear dynamic behavior.