Deposition and etching of HMDSO/SF6 plasma polymerized thin films
| dc.contributor.author | Santana, R. G. [UNESP] | |
| dc.contributor.author | Honda, R. Y. [UNESP] | |
| dc.contributor.author | Algatti, M. A. [UNESP] | |
| dc.contributor.author | Kayama, M. E. [UNESP] | |
| dc.contributor.author | Mota, R. P. [UNESP] | |
| dc.contributor.institution | Universidade Estadual Paulista (UNESP) | |
| dc.date.accessioned | 2022-04-28T18:54:22Z | |
| dc.date.available | 2022-04-28T18:54:22Z | |
| dc.date.issued | 1997-04-01 | |
| dc.description.affiliation | UNESP-Universidade Estadual Paulista Campus de Guaratinguetá, 12500-000 Guaratinguetá, SP | |
| dc.description.affiliationUnesp | UNESP-Universidade Estadual Paulista Campus de Guaratinguetá, 12500-000 Guaratinguetá, SP | |
| dc.format.extent | 1029-1030 | |
| dc.identifier.citation | American Chemical Society, Polymer Preprints, Division of Polymer Chemistry, v. 38, n. 1, p. 1029-1030, 1997. | |
| dc.identifier.issn | 0032-3934 | |
| dc.identifier.scopus | 2-s2.0-0031125567 | |
| dc.identifier.uri | http://hdl.handle.net/11449/219202 | |
| dc.language.iso | eng | |
| dc.relation.ispartof | American Chemical Society, Polymer Preprints, Division of Polymer Chemistry | |
| dc.source | Scopus | |
| dc.title | Deposition and etching of HMDSO/SF6 plasma polymerized thin films | en |
| dc.type | Artigo | pt |
| dspace.entity.type | Publication | |
| relation.isOrgUnitOfPublication | a4071986-4355-47c3-a5a3-bd4d1a966e4f | |
| relation.isOrgUnitOfPublication.latestForDiscovery | a4071986-4355-47c3-a5a3-bd4d1a966e4f | |
| unesp.campus | Universidade Estadual Paulista (UNESP), Faculdade de Engenharia e Ciências, Guaratinguetá | pt |