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Fluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorine

dc.contributor.authorDurrant, Steven F.
dc.contributor.authorMota, Rogério Pinto [UNESP]
dc.contributor.authorde Moraes, Mario A.B.
dc.contributor.institutionUniversidade Estadual de Campinas (UNICAMP)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:17:29Z
dc.date.available2014-05-27T11:17:29Z
dc.date.issued1992-11-20
dc.description.abstractMixtures of C6H6 and SF6 were polymerized in an r.f. discharge. Actinometry (quantitative optical emission spectroscopy) was used to determine trends in the plasma concentrations of the species F, H and CH as a function of the proportion of SF6 in the feed. Infrared spectroscopy and electron spectroscopy for chemical analysis were employed to characterize the deposited material. Increasing proportions of SF6 in the feed produced increased fragmentation of the benzene molecules and greater fluorination of the deposited material. The deposition rate, as determined by optical interferometry, was found to be enhanced about 4 times by the presence of 10-20% SF6 in the feed. At 50% SF6 in the feed, deposition rates were greater than in pure C6H6 plasmas despite the (probably large) etching effect of atomic fluorine from the discharge. Relationships between the plasma composition, electron density and temperature, film composition and growth rate are discussed. © 1992.en
dc.description.affiliationInstituto de Física Gleb Wataghin Universidade Estadual de Campinas, CEP 13081 Campinas, São Paulo
dc.description.affiliationDepartamento de Física e Química FEG Universidade Estadual Paulista, Guaratingueta, CEP 12500 Sao Paulo
dc.description.affiliationUnespDepartamento de Física e Química FEG Universidade Estadual Paulista, Guaratingueta, CEP 12500 Sao Paulo
dc.format.extent295-302
dc.identifier.citationThin Solid Films, v. 220, n. 1-2, p. 295-302, 1992.
dc.identifier.issn0040-6090
dc.identifier.orcid0000-0002-4511-3768
dc.identifier.scopus2-s2.0-0026947101
dc.identifier.urihttp://hdl.handle.net/11449/64275
dc.language.isoeng
dc.relation.ispartofThin Solid Films
dc.relation.ispartofjcr1.939
dc.relation.ispartofsjr0,617
dc.rights.accessRightsAcesso restrito
dc.sourceScopus
dc.subjectBenzene
dc.subjectChemical analysis
dc.subjectElectron spectroscopy
dc.subjectEmission spectroscopy
dc.subjectFluorine
dc.subjectInfrared spectroscopy
dc.subjectPlasma devices
dc.subjectPolymers
dc.subjectSulfur hexafluoride
dc.subjectPlastic films
dc.titleFluorinated polymer films from r.f. plasmas containing benzene and sulfur hexafluorineen
dc.typeArtigo
dcterms.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
dspace.entity.typePublication
unesp.author.orcid0000-0002-4511-3768[1]
unesp.campusUniversidade Estadual Paulista (UNESP), Faculdade de Engenharia, Guaratinguetápt
unesp.departmentFísica e Química - FEGpt

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