High dielectric constant of SrTiO3 thin films prepared by chemical process
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Data
2000-10-01
Autores
Pontes, F. M.
Lee, EJH
Leite, E. R.
Longo, Elson [UNESP]
Varela, José Arana [UNESP]
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Kluwer Academic Publ
Resumo
SrTiO3 thin films were prepared by the polymeric precursor method and deposited by spin-coating onto Pt/Ti/SiO2/Si(100) substrates. The spin-coated films heat treated at 700 degrees C were crack-free, dense, and homogeneous. Microstructural and morphological evaluations were followed by grazing incident X-ray, scanning electron microscopy and atomic force microscopy. Dielectric studies indicated a dielectric constant of about 475, which is higher than that of ceramic SrTiO3, and a factor dissipation of about 0.050 at 100 kHz. SrTiO3 thin films were found to have paraelectric properties with C-V characteristics. (C) 2000 Kluwer Academic Publishers.
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Journal of Materials Science. Dordrecht: Kluwer Academic Publ, v. 35, n. 19, p. 4783-4787, 2000.