Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma
MetadataShow full item record
Hydrogenated amorphous carbon (a-C:H) films were grown at room temperature on glass and polished silicon substrates using RF-PECVD (Radio-Frequency Plasma Enhanced Chemical Vapor Deposition). Plasmas composed by 30% of acetylene and 70% of argon were excited by the application of RF signal to the sample holder with power ranging from 5 to 125W. After deposition, the films were submitted to SF6-plasma treatment for 5 minutes. SF6 plasmas were generated at a pressure of 13.3 Pa by a RF power supply operating at 13.56 MHz with the output fixed at 70 W. The resulting films were characterized in terms of their molecular structure, chemical composition, surface morphology, thickness, contact angle, and surface free energy. During the SF6 plasma treatment, fluorine species were incorporated in the film structure causing chemical alterations. The interaction of chemical species generated in the SF6 plasmas with surface species was responsible for the decrease of the film thickness and surface energy, and for the increase of the film roughness and hydrophobicity. Published by Elsevier B.V.
How to cite this document
Showing items related by title, author, creator and subject.
Pinho, Sheila Zambello de ; Oliveira, José Brás Barreto de ; Gazola, Rodrigo José Cristiano ; Mazotti, Adriano César ; Molero, Camila Schimite ; Mendes, Carolina Borghi ; Mello, Denise Fernandes de ; Marques, Emilia de Mendonça Rosa ; Talamoni, Jandira Liria Biscalquini ; Silva, José Humberto Dias da et al. (Coleção PROGRAD (UNESP), 2011) [Livro]
Pinho, Sheila Zambello de ; Oliveira, José Brás Barreto de ; Pontes, Sueli Rodrigues ; Almeida, Djanira Soares de Oliveira e ; Godoy, Kathya Maria Ayres de ; Rosa, Claudia de Souza ; Nunes, Julianus Araújo ; Salvador, Sérgio Azevedo ; David, Célia Maria ; Vilche Peña, Angel Fidel et al. (Coleção PROGRAD (UNESP), 2011) [Livro]
Pinho, Sheila Zambello de ; Spazziani, Maria de Lourdes ; Mendonça, Sueli Guadelupe de Lima ; Rubo, Elisabete Aparecida Andrello ; Villarreal, Dalva Maria de Oliveira ; Duarte, Camila ; Okamoto, Mary Yoko ; Souza, Thais R. ; Garms, Gilza Maria Zauhy ; Marin, Fátima Aparecida Dias Gomes et al. (Coleção PROGRAD (UNESP), 2012) [Livro]