Comparison of RF and Pulsed Magnetron Sputtering for the Deposition of AZO Thin Films on PET

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dc.contributor.authorOliveira, L. P. G. [UNESP]
dc.contributor.authorRamos, R. [UNESP]
dc.contributor.authorRabelo, W. H. [UNESP]
dc.contributor.authorRangel, E. C. [UNESP]
dc.contributor.authorDurrant, Steven F. [UNESP]
dc.contributor.authorBortoleto, J. R. R. [UNESP]
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2020-12-11T23:33:32Z
dc.date.available2020-12-11T23:33:32Z
dc.date.issued2020-01-01
dc.description.abstractAZO thin films (around 200 nm thick) were grown on polyethylene terephthalate (PET) at room temperature. The plasma was activated using a 13.56 MHz (RF) or a 15 kHz pulsed (PMS) source at a power of 60 W. Optical reflection and transmittance were measured using a UV-Vis-NIR spectrometer over the wavelengths from 190 nm to 2500 nm. All samples show average transmittances greater than 83% in the visible region. The electrical resistivity was measured by the linear four-point probe method to be around 0.001 Omega cm for 200 nm-thick AZO films grown by PMS. XRD results indicated that the films had a hexagonal wurtzite structure and were preferentially oriented in the (002) plane. The surface morphology of the AZO thin films was characterized using Scanning Electron Microscopy (SEM); film chemical composition was studied using Energy Dispersive X-ray Spectroscopy (EDS). For this, an EDS coupled to the Scanning Electron Microscope was used. Only for films grown by PMS were no cracks observed.en
dc.description.affiliationUniv Estadual Paulista, UNESP, Inst Ciencia & Tecnol Sorocaba ICTS, Av Tres Marco 511, BR-18087180 Sorocaba, SP, Brazil
dc.description.affiliationUnespUniv Estadual Paulista, UNESP, Inst Ciencia & Tecnol Sorocaba ICTS, Av Tres Marco 511, BR-18087180 Sorocaba, SP, Brazil
dc.description.sponsorshipConselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)
dc.description.sponsorshipFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)
dc.description.sponsorshipCoordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)
dc.description.sponsorshipIdCNPq: 555774/2010-4
dc.description.sponsorshipIdCNPq: 301622/2012-4
dc.description.sponsorshipIdFAPESP: 2017/15853-0
dc.description.sponsorshipIdCAPES: 001
dc.description.sponsorshipIdCAPES: 1754231/2017
dc.description.sponsorshipIdCAPES: 1795290/2018
dc.format.extent6
dc.identifierhttp://dx.doi.org/10.1590/1980-5373-MR-2019-0643
dc.identifier.citationMaterials Research-ibero-american Journal Of Materials. Sao Carlos: Univ Fed Sao Carlos, Dept Engenharia Materials, v. 23, n. 3, 6 p., 2020.
dc.identifier.doi10.1590/1980-5373-MR-2019-0643
dc.identifier.fileS1516-14392020000300219.pdf
dc.identifier.issn1516-1439
dc.identifier.scieloS1516-14392020000300219
dc.identifier.urihttp://hdl.handle.net/11449/197884
dc.identifier.wosWOS:000558650800001
dc.language.isoeng
dc.publisherUniv Fed Sao Carlos, Dept Engenharia Materials
dc.relation.ispartofMaterials Research-ibero-american Journal Of Materials
dc.rights.accessRightsAcesso aberto
dc.sourceWeb of Science
dc.subjectTCO
dc.subjectzinc oxide
dc.subjectPET
dc.subjectmagnetron sputtering
dc.titleComparison of RF and Pulsed Magnetron Sputtering for the Deposition of AZO Thin Films on PETen
dc.typeArtigo
dcterms.rightsHolderUniv Fed Sao Carlos, Dept Engenharia Materials

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