Plasma-polymerized acetylene nanofilms modified by nitrogen ion implantation

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dc.contributor.authorSantos, D. C R
dc.contributor.authorMota, Rogério Pinto [UNESP]
dc.contributor.authorHonda, R. Y. [UNESP]
dc.contributor.authorCruz, N. C. [UNESP]
dc.contributor.authorRangel, E. C. [UNESP]
dc.contributor.institutionCEETEPS
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:29:41Z
dc.date.available2014-05-27T11:29:41Z
dc.date.issued2013-06-15
dc.description.abstractThin films were prepared by plasma enhanced chemical vapour deposition (PECVD) from a mixture of acetylene and argon, and post deposition-treated by plasma immersion ion implantation (PIII). The effect of PIII on the nanofilms properties was evaluated as a function of treatment time. The average thickness and roughness were diminished upon PIII. On the other hand, hardness (0.7-3.9 GPa) and elastic modulus (29-54 GPa) increased upon 60 min of ion bombardment. Such results are ascribed mainly to the densification of the film structure caused by the increment in the crosslinking degree with increasing the energy deposited in the films. Wettability of the samples, investigated by contact angle measurements, was reduced (from 64 to 21°) right after PIII. This result, attributed to the introduction of polar groups in the film structure, was not preserved as the sample was aged in atmosphere. After aging, contact angles were larger than 70° but still smaller than 90°. Although the wettability has decreased with aging, the hydrophilic character of the samples was preserved. For certain treatment times, nitrogen PIII turned the plasma-polymerized acetylene films smoother, denser, mechanically and tribologicaly more resistant than the as-deposited material. © 2013 Elsevier B.V.en
dc.description.affiliationCollege of Technology CEETEPS, Rodovia Vereador Abel Fabrício Dias, 4010, Água Preta, 12455-010, Pindamonhangaba, SP
dc.description.affiliationPlasma Laboratory College of Engineering UNESP, 12516-410, Guaratinguetá, SP
dc.description.affiliationTechnological Plasma Laboratory UNESP, 18087-180, Sorocaba, SP
dc.description.affiliationUnespPlasma Laboratory College of Engineering UNESP, 12516-410, Guaratinguetá, SP
dc.description.affiliationUnespTechnological Plasma Laboratory UNESP, 18087-180, Sorocaba, SP
dc.format.extent88-93
dc.identifierhttp://dx.doi.org/10.1016/j.apsusc.2013.01.105
dc.identifier.citationApplied Surface Science, v. 275, p. 88-93.
dc.identifier.doi10.1016/j.apsusc.2013.01.105
dc.identifier.issn0169-4332
dc.identifier.scopus2-s2.0-84877581539
dc.identifier.urihttp://hdl.handle.net/11449/75659
dc.identifier.wosWOS:000318977300017
dc.language.isoeng
dc.relation.ispartofApplied Surface Science
dc.relation.ispartofjcr4.439
dc.relation.ispartofsjr1,093
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectAcetylene
dc.subjectHardness
dc.subjectIon implantation
dc.subjectPlasma
dc.subjectWettability
dc.subjectCross-linking degree
dc.subjectFilm structure
dc.subjectNano films
dc.subjectNitrogen ion implantations
dc.subjectPlasma enhanced chemical vapour depositions (PECVD)
dc.subjectPlasma immersion ion implantation
dc.subjectPolar groups
dc.subjectTreatment time
dc.subjectContact angle
dc.subjectDeposits
dc.subjectIon bombardment
dc.subjectLighting
dc.subjectNitrogen
dc.subjectPlasma applications
dc.subjectPlasma enhanced chemical vapor deposition
dc.subjectPlasmas
dc.subjectWetting
dc.subjectNitrogen plasma
dc.titlePlasma-polymerized acetylene nanofilms modified by nitrogen ion implantationen
dc.typeTrabalho apresentado em evento
dcterms.licensehttp://www.elsevier.com/about/open-access/open-access-policies/article-posting-policy
unesp.author.lattes7157327220048138
unesp.author.lattes6885205382275380
unesp.author.orcid0000-0002-0354-3890[4]
unesp.campusUniversidade Estadual Paulista (Unesp), Instituto de Ciência e Tecnologia, Sorocabapt

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