Dynamic analysis of a new piezoelectric flextensional actuator using the J1-J4 optical interferometric method

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dc.contributor.authorMarçal, Luiz A. P. [UNESP]
dc.contributor.authorLeão, José V. F. [UNESP]
dc.contributor.authorNader, Gilder
dc.contributor.authorSilva, Emílio C. N.
dc.contributor.authorHiguti, Ricardo T. [UNESP]
dc.contributor.authorKitano, Cláudio [UNESP]
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.contributor.institutionUniversidade de São Paulo (USP)
dc.date.accessioned2014-05-27T11:21:46Z
dc.date.available2014-05-27T11:21:46Z
dc.date.issued2005-12-01
dc.description.abstractPiezoelectric actuators are widely used in positioning systems which demand high resolution such as scanning microscopy, fast mirror scanners, vibration cancellation, cell manipulation, etc. In this work a piezoelectric flextensional actuator (PFA), designed with the topology optimization method, is experimentally characterized by the measurement of its nanometric displacements using a Michelson interferometer. Because this detection process is non-linear, adequate techniques must be applied to obtain a linear relationship between an output electrical signal and the induced optical phase shift. Ideally, the bias phase shift in the interferometer should remain constant, but in practice it suffers from fading. The J1-J4 spectral analysis method provides a linear and direct measurement of dynamic phase shift in a no-feedback and no-phase bias optical homodyne interferometer. PFA application such as micromanipulation in biotechnology demands fast and precise movements. So, in order to operate with arbitrary control signals the PFA must have frequency bandwidth of several kHz. However as the natural frequencies of the PFA are low, unwanted dynamics of the structure are often a problem, especially for scanning motion, but also if trajectories have to be followed with high velocities, because of the tracking error phenomenon. So the PFA must be designed in such a manner that the first mechanical resonance occurs far beyond this band. Thus it is important to know all the PFA resonance frequencies. In this work the linearity and frequency response of the PFA are evaluated up to 50 kHz using optical interferometry and the J1-J4 method.en
dc.description.affiliationDepartment of Electrical Engineering São Paulo State University UNESP, P.O. Box 31, 15385-000, Ilha Solteira, S.P.
dc.description.affiliationDepartment of Mechatronics and Mechanical Systems Engineering Escola Politécnica Universidade de São Paulo, P.O. Box 31, 05508-900 - São Paulo, S.P.
dc.description.affiliationUnespDepartment of Electrical Engineering São Paulo State University UNESP, P.O. Box 31, 15385-000, Ilha Solteira, S.P.
dc.format.extent1993-2002
dc.identifier.citationInternational Congress on Noise Control Engineering 2005, INTERNOISE 2005, v. 3, p. 1993-2002.
dc.identifier.lattes2883440351895167
dc.identifier.lattes6405339510883203
dc.identifier.orcid0000-0003-4201-5617
dc.identifier.orcid0000-0001-6320-755X
dc.identifier.scopus2-s2.0-84873820254
dc.identifier.urihttp://hdl.handle.net/11449/68676
dc.language.isoeng
dc.relation.ispartofInternational Congress on Noise Control Engineering 2005, INTERNOISE 2005
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectCell manipulation
dc.subjectControl signal
dc.subjectDetection process
dc.subjectDirect measurement
dc.subjectDynamic phase
dc.subjectElectrical signal
dc.subjectFlextensional actuator
dc.subjectFrequency band width
dc.subjectHigh resolution
dc.subjectHigh velocity
dc.subjectHomodyne interferometers
dc.subjectLinear relationships
dc.subjectMechanical resonance
dc.subjectMicro manipulation
dc.subjectMirror scanner
dc.subjectNanometric displacements
dc.subjectOptical interferometric method
dc.subjectOptical interferometry
dc.subjectOptical phase shifts
dc.subjectPositioning system
dc.subjectResonance frequencies
dc.subjectScanning microscopy
dc.subjectSpectral analysis method
dc.subjectTopology Optimization Method
dc.subjectTracking errors
dc.subjectVibration cancellation
dc.subjectFeedback
dc.subjectFrequency response
dc.subjectInterferometry
dc.subjectMichelson interferometers
dc.subjectMolecular biology
dc.subjectNatural frequencies
dc.subjectPhase shift
dc.subjectPhase shifters
dc.subjectPiezoelectricity
dc.subjectSpectrum analysis
dc.subjectPiezoelectric actuators
dc.titleDynamic analysis of a new piezoelectric flextensional actuator using the J1-J4 optical interferometric methoden
dc.typeTrabalho apresentado em evento
unesp.author.lattes6405339510883203[5]
unesp.author.lattes2883440351895167[6]
unesp.author.orcid0000-0003-4201-5617[5]
unesp.author.orcid0000-0001-6320-755X[6]
unesp.campusUniversidade Estadual Paulista (Unesp), Faculdade de Engenharia, Ilha Solteirapt
unesp.departmentEngenharia Elétrica - FEISpt

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Ilha Solteira - FEIS - Faculdade de Engenharia