Double optical monitoring of time-dependent film formation
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Abstract
A brief overview of optical monitoring for vacuum and wet bench film deposition processes is presented. Interferometric and polarimetric measurements are combined with regard to simultaneous real-time monitoring of refractive index and physical thickness. Monitor stability and accuracy are verified with transparent oil standards. This double optical technique is applied to dip coating with a multi-component Zirconyl Chloride aqueous solution, whose time varying refractive index and physical thickness curves indicate significant sensitivity to changes of film flow properties during the process.
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Keywords
Optical properties, Quality control, Reflection, Refractive index, Optical monitoring, Physical thickness, Polarimetric measurements, Thin films
Language
English
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v. 5870, p. 1-6.
