Publicação: Influence of oxygen atmosphere on LiNbO3 thin films prepared by Pechini process
Carregando...
Data
Orientador
Coorientador
Pós-graduação
Curso de graduação
Título da Revista
ISSN da Revista
Título de Volume
Editor
Tipo
Trabalho apresentado em evento
Direito de acesso
Acesso aberto
Resumo
Thin films of lithium niobate were deposited on the Pt/Ti/SiO2 (111) substrates by the polymeric precursor method (Pechini process). Annealing in static air and oxygen atmosphere was performed at 500°C for 3 hours. The films obtained were characterized by X-ray diffraction, scanning electron microscopy and transmission electron microscopy. The dielectric constant, dissipation factor and resistance were measured in frequency region from 10 Hz to 10 MHz. Electrical characterizations of the films pointed to ferroelectricity via hysteresis loop. The influence of oxygen atmosphere on crystallization and properties of LiNbO3 thin films is discussed.
Descrição
Palavras-chave
Annealing, Chemical vapor deposition, Data reduction, Epitaxial growth, Ferroelectric materials, Grain boundaries, Lithium niobate, MIM devices, Polarization, Positive ions, Sol-gels, Stoichiometry, Transmission electron microscopy, X ray powder diffraction, Atmosphere flow, Electrooptical, Ion distribution, Pechini process, Thin films
Idioma
Inglês
Como citar
Proceedings of the International Conference on Microelectronics, v. 24 II, p. 511-514.
