Publicação: Influence of oxygen atmosphere on LiNbO3 thin films prepared by Pechini process
dc.contributor.author | Stojanovic, B. D. | |
dc.contributor.author | Simões, A. Z. [UNESP] | |
dc.contributor.author | Zaghete, M. A. [UNESP] | |
dc.contributor.author | Setter, N. | |
dc.contributor.author | Varela, José Arana [UNESP] | |
dc.contributor.institution | University of Belgrade | |
dc.contributor.institution | Universidade Estadual Paulista (Unesp) | |
dc.contributor.institution | Swiss Fed. Institute of Technology | |
dc.date.accessioned | 2014-05-27T11:21:07Z | |
dc.date.available | 2014-05-27T11:21:07Z | |
dc.date.issued | 2004-07-27 | |
dc.description.abstract | Thin films of lithium niobate were deposited on the Pt/Ti/SiO2 (111) substrates by the polymeric precursor method (Pechini process). Annealing in static air and oxygen atmosphere was performed at 500°C for 3 hours. The films obtained were characterized by X-ray diffraction, scanning electron microscopy and transmission electron microscopy. The dielectric constant, dissipation factor and resistance were measured in frequency region from 10 Hz to 10 MHz. Electrical characterizations of the films pointed to ferroelectricity via hysteresis loop. The influence of oxygen atmosphere on crystallization and properties of LiNbO3 thin films is discussed. | en |
dc.description.affiliation | Department of Materials Center for Multidisciplinary Studies University of Belgrade, Kneza Viseslava la, 11000 Beograd | |
dc.description.affiliation | Department of Chemistry Faculty for Chemistry IQ-UNESP, 14800970 Araraquara | |
dc.description.affiliation | EPFL Swiss Fed. Institute of Technology, Lausanne | |
dc.description.affiliationUnesp | Department of Chemistry Faculty for Chemistry IQ-UNESP, 14800970 Araraquara | |
dc.format.extent | 511-514 | |
dc.identifier | http://dx.doi.org/10.1109/ICMEL.2004.1314875 | |
dc.identifier.citation | Proceedings of the International Conference on Microelectronics, v. 24 II, p. 511-514. | |
dc.identifier.doi | 10.1109/ICMEL.2004.1314875 | |
dc.identifier.lattes | 3573363486614904 | |
dc.identifier.scopus | 2-s2.0-3142705080 | |
dc.identifier.uri | http://hdl.handle.net/11449/67803 | |
dc.language.iso | eng | |
dc.relation.ispartof | Proceedings of the International Conference on Microelectronics | |
dc.rights.accessRights | Acesso aberto | |
dc.source | Scopus | |
dc.subject | Annealing | |
dc.subject | Chemical vapor deposition | |
dc.subject | Data reduction | |
dc.subject | Epitaxial growth | |
dc.subject | Ferroelectric materials | |
dc.subject | Grain boundaries | |
dc.subject | Lithium niobate | |
dc.subject | MIM devices | |
dc.subject | Polarization | |
dc.subject | Positive ions | |
dc.subject | Sol-gels | |
dc.subject | Stoichiometry | |
dc.subject | Transmission electron microscopy | |
dc.subject | X ray powder diffraction | |
dc.subject | Atmosphere flow | |
dc.subject | Electrooptical | |
dc.subject | Ion distribution | |
dc.subject | Pechini process | |
dc.subject | Thin films | |
dc.title | Influence of oxygen atmosphere on LiNbO3 thin films prepared by Pechini process | en |
dc.type | Trabalho apresentado em evento | |
dcterms.license | http://www.ieee.org/publications_standards/publications/rights/rights_policies.html | |
dspace.entity.type | Publication | |
unesp.author.lattes | 3573363486614904 | |
unesp.campus | Universidade Estadual Paulista (UNESP), Instituto de Química, Araraquara | pt |
unesp.campus | Universidade Estadual Paulista (UNESP), Faculdade de Engenharia, Guaratinguetá | pt |
unesp.department | Materiais e Tecnologia - FEG | pt |
unesp.department | Físico-Química - IQAR | pt |