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Critical parameter determination of sonic flow controller diamond microtubes and micronozzles

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dc.contributor.authorMammana, S. S.
dc.contributor.authorDegasperi, F. T. [UNESP]
dc.contributor.authorSalvadori, M. C.
dc.contributor.authorSparapani, D. C. [UNESP]
dc.contributor.authorLaino, M. F. [UNESP]
dc.contributor.authorRangel, R. C. [UNESP]
dc.contributor.authorTeixeira, F. S.
dc.contributor.authorCattani, M.
dc.contributor.institutionUniversidade de São Paulo (USP)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:22:45Z
dc.date.available2014-05-27T11:22:45Z
dc.date.issued2007-12-19
dc.description.abstractIn this article, the authors measure throughput of sonic diamond microtubes and micronozzles that can work as passive gas flow controllers and flow meters under choking conditions. The behavior of the outlet pressure through the microdevices using an experimental setup with constant volume and constant temperature was determined in order to obtain the critical throughput, the critical mass flow rate, and the discharge coefficients of the diamond sonic microdevices. © 2007 American Vacuum Society.en
dc.description.affiliationInstitute of Physics University of São Paulo, CP 66318, CEP 05315-970 São Paulo, São Paulo
dc.description.affiliationFaculdade de Tecnologia de São Paulo Centro Estadual de Educa̧ão Tecnológica Paula Souza (CEETEPS) UNESP-São Paulo, São Paulo
dc.description.affiliationUnespFaculdade de Tecnologia de São Paulo Centro Estadual de Educa̧ão Tecnológica Paula Souza (CEETEPS) UNESP-São Paulo, São Paulo
dc.format.extent1804-1807
dc.identifierhttp://dx.doi.org/10.1116/1.2790924
dc.identifier.citationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v. 25, n. 6, p. 1804-1807, 2007.
dc.identifier.doi10.1116/1.2790924
dc.identifier.file2-s2.0-37149002798.pdf
dc.identifier.issn1071-1023
dc.identifier.scopus2-s2.0-37149002798
dc.identifier.urihttp://hdl.handle.net/11449/70217
dc.language.isoeng
dc.relation.ispartofJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
dc.relation.ispartofjcr1.314
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectDiamonds
dc.subjectFlow rate
dc.subjectFlowmeters
dc.subjectThroughput
dc.subjectDischarge coefficients
dc.subjectMicrodevices
dc.subjectMicronozzles
dc.subjectMicrotubes
dc.subjectSonic flow
dc.subjectFlow control
dc.titleCritical parameter determination of sonic flow controller diamond microtubes and micronozzlesen
dc.typeArtigo
dcterms.licensehttp://publishing.aip.org/authors/web-posting-guidelines
dspace.entity.typePublication

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