Preparação de filmes finos de TeO2–Li2O pelo método Pechini
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Data
2018-10-26
Autores
Bataliotti, Murilo Dobri
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Universidade Estadual Paulista (Unesp)
Resumo
O presente trabalho tem como objetivo a síntese e caracterização estrutural de filmes finos a base de TeO2 usando o método Pechini. Os filmes finos foram produzidos seguindo a estequiometria 80TeO2–20Li2O (% molar), utilizando como precursores metálicos o ácido telúrico (H6TeO6) e o carbonato de lítio (Li2CO3). Os materiais precursores foram solubilizados em solução aquosa de ácido cítrico sob aquecimento para obtenção de um citrato metálico, o qual foi acrescido de etilenoglicol para polimerização. A resina polimérica obtida foi depositada sobre dois diferentes substratos, vidro e silício cristalino, pela técnica de spin-coating, para a obtenção dos filmes finos. Em substratos de vidro, a pirólise ocorreu a 300°C e o tratamento térmico foi realizado à 400°C e nos substratos de Si, os filmes foram pirolisados a 500°C e tratados termicamente em 600°C. A caracterização dos filmes foi realizada por meio das técnicas de difração de raios-X, microscopia eletrônica de varredura, espectroscopia de energia dispersiva e Raman. Os filmes obtidos apresentaram espessuras da ordem de micro a nanômetros e, dos dados de Espectroscopia de Energia Dispersiva, foi possível acompanhar a transformação do Te metálico para as fases do TeO2. Dos dados de difração de raios X e Raman foi possível identificar e observar a transição entre as fases γ e α-TeO2. A qualidade dos filmes finos obtidos usando a rota estabelecida neste trabalho, demonstra a viabilidade da produção de filmes finos a base de telúrio pelo método Pechini.
The objective of this work is the synthesis and structural characterization of thin films based on TeO2 using the Pechini method. The thin films were produced following the stoichiometry 80TeO2-20Li2O (mol%) using telluric acid (H6TeO6) and lithium carbonate (Li2CO3) as metallic precursors. The precursor materials were solubilized in aqueous solution of citric acid under heating to obtain a metal citrate, which was added with ethylene glycol for polymerization. The obtained polymer resin was deposited on two different substrates, glass and crystalline silicon, by the spin-coating technique, to obtain the thin films. On glass substrates, the pyrolysis occurred at 300°C and the heat treatment was performed at 400°C, and on the Si substrates, the films were pyrolyzed at 500°C and thermally treated at 600°C. The films were characterized by X-ray diffraction, scanning electron microscopy, dispersive energy and Raman spectroscopy. The films obtained presented thicknesses of the order of micro to nanometers and, from the data of Dispersive Energy Spectroscopy, it was possible to follow the transformation of the metallic Te to the phases of TeO2. From the X-ray and Raman diffraction data it was possible to identify and observe the transition between the γ and α-TeO2 phases. The quality of the thin films obtained through the route established in this work, demonstrates the practicability of the preparation of tellurium based thin films by the Pechini method.
The objective of this work is the synthesis and structural characterization of thin films based on TeO2 using the Pechini method. The thin films were produced following the stoichiometry 80TeO2-20Li2O (mol%) using telluric acid (H6TeO6) and lithium carbonate (Li2CO3) as metallic precursors. The precursor materials were solubilized in aqueous solution of citric acid under heating to obtain a metal citrate, which was added with ethylene glycol for polymerization. The obtained polymer resin was deposited on two different substrates, glass and crystalline silicon, by the spin-coating technique, to obtain the thin films. On glass substrates, the pyrolysis occurred at 300°C and the heat treatment was performed at 400°C, and on the Si substrates, the films were pyrolyzed at 500°C and thermally treated at 600°C. The films were characterized by X-ray diffraction, scanning electron microscopy, dispersive energy and Raman spectroscopy. The films obtained presented thicknesses of the order of micro to nanometers and, from the data of Dispersive Energy Spectroscopy, it was possible to follow the transformation of the metallic Te to the phases of TeO2. From the X-ray and Raman diffraction data it was possible to identify and observe the transition between the γ and α-TeO2 phases. The quality of the thin films obtained through the route established in this work, demonstrates the practicability of the preparation of tellurium based thin films by the Pechini method.
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Filmes finos, TeO2, Método Pechini, Espectroscopia Raman, Difração de raios X, Thin films, Pechini method, Raman spectroscopy, X-ray diffraction