Foundry Polymer-Based Inverted-Rib Waveguides

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dc.contributor.authorMalheiros-Silveira, G. N. [UNESP]
dc.contributor.authorFinardi, C. A.
dc.contributor.authorVan Etten, E. A.M.A.
dc.contributor.authorBurger, T. S.
dc.contributor.authorDa Silva, R. C.G.
dc.contributor.authorDaltrini, A. M.
dc.contributor.authorPanepucci, R. R.
dc.contributor.institutionCentro de Tecnologia da Informação (CTI) Renato Archer
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.contributor.institutionCEITEC S.A Semiconductors
dc.date.accessioned2019-10-06T15:34:45Z
dc.date.available2019-10-06T15:34:45Z
dc.date.issued2019-01-11
dc.description.abstractDevelopment of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.en
dc.description.affiliationCentro de Tecnologia da Informação (CTI) Renato Archer
dc.description.affiliationUniversidade Estadual Paulista (UNESP) Câmpus Experimental de São
dc.description.affiliationCEITEC S.A Semiconductors
dc.description.affiliationUnespUniversidade Estadual Paulista (UNESP) Câmpus Experimental de São
dc.identifierhttp://dx.doi.org/10.1109/SBFoton-IOPC.2018.8610902
dc.identifier.citation2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018.
dc.identifier.doi10.1109/SBFoton-IOPC.2018.8610902
dc.identifier.scopus2-s2.0-85061980925
dc.identifier.urihttp://hdl.handle.net/11449/187392
dc.language.isoeng
dc.relation.ispartof2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018
dc.rights.accessRightsAcesso restrito
dc.sourceScopus
dc.subjectoptical device fabrication
dc.subjectoptical polymers
dc.subjectoptical resonators
dc.titleFoundry Polymer-Based Inverted-Rib Waveguidesen
dc.typeTrabalho apresentado em evento

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