Amorphous hydrogenated carbon films treated by SF(6) plasma
Carregando...
Data
2009-01-01
Orientador
Coorientador
Pós-graduação
Curso de graduação
Título da Revista
ISSN da Revista
Título de Volume
Editor
Iop Publishing Ltd
Tipo
Trabalho apresentado em evento
Direito de acesso
Acesso aberto
Resumo
This work was performed to verify the chemical structure, mechanical and hydrophilic properties of amorphous hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition, using acetylene/argon mixture as monomer. Films were prepared in a cylindrical quartz reactor, fed by 13.56 MHz radiofrequency. The films were grown during 5 min, for power varying from 25 to 125 W at a fixed pressure of 9.5 Pa. After deposition, all samples were treated by SF(6) plasma with the aim of changing their hydrophilic character. Film chemical structure investigated by Raman spectroscopy, revealed the increase of sp(3) hybridized carbon bonds as the plasma power increases. Hardness measurements performed by the nanoindentation technique showed an improvement from 5 GPa to 14 GPa following the increase discharge power. The untreated films presented a hydrophilic character, which slightly diminished after SF(6) plasma treatment.
Descrição
Palavras-chave
Idioma
Inglês
Como citar
Xix Latin American Symposium on Solid State Physics (slafes). Bristol: Iop Publishing Ltd, v. 167, p. 4, 2009.