Amorphous hydrogenated carbon films treated by SF(6) plasma

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dc.contributor.authorMarins, N. M. S. [UNESP]
dc.contributor.authorMota, Rogério Pinto [UNESP]
dc.contributor.authorSantos, D. C. R. [UNESP]
dc.contributor.authorHonda, Roberto Yzumi [UNESP]
dc.contributor.authorKayama, M. E. [UNESP]
dc.contributor.authorKostov, K. G. [UNESP]
dc.contributor.authorAlgatti, M. A. [UNESP]
dc.contributor.authorCruz, N. C.
dc.contributor.authorRangel, E. C.
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-20T13:27:44Z
dc.date.available2014-05-20T13:27:44Z
dc.date.issued2009-01-01
dc.description.abstractThis work was performed to verify the chemical structure, mechanical and hydrophilic properties of amorphous hydrogenated carbon films prepared by plasma enhanced chemical vapor deposition, using acetylene/argon mixture as monomer. Films were prepared in a cylindrical quartz reactor, fed by 13.56 MHz radiofrequency. The films were grown during 5 min, for power varying from 25 to 125 W at a fixed pressure of 9.5 Pa. After deposition, all samples were treated by SF(6) plasma with the aim of changing their hydrophilic character. Film chemical structure investigated by Raman spectroscopy, revealed the increase of sp(3) hybridized carbon bonds as the plasma power increases. Hardness measurements performed by the nanoindentation technique showed an improvement from 5 GPa to 14 GPa following the increase discharge power. The untreated films presented a hydrophilic character, which slightly diminished after SF(6) plasma treatment.en
dc.description.affiliationUNESP, Fac Engn, Lab Plasma, BR-12516410 Guaratingueta, SP, Brazil
dc.description.affiliationUnespUNESP, Fac Engn, Lab Plasma, BR-12516410 Guaratingueta, SP, Brazil
dc.format.extent4
dc.identifierhttp://dx.doi.org/10.1088/1742-6596/167/1/012054
dc.identifier.citationXix Latin American Symposium on Solid State Physics (slafes). Bristol: Iop Publishing Ltd, v. 167, p. 4, 2009.
dc.identifier.doi10.1088/1742-6596/167/1/012054
dc.identifier.fileWOS000298811200054.pdf
dc.identifier.issn1742-6588
dc.identifier.lattes0406258050385008
dc.identifier.lattes0400554449253191
dc.identifier.lattes1946509801000450
dc.identifier.lattes9585258374949244
dc.identifier.urihttp://hdl.handle.net/11449/9181
dc.identifier.wosWOS:000298811200054
dc.language.isoeng
dc.publisherIop Publishing Ltd
dc.relation.ispartofXix Latin American Symposium on Solid State Physics (slafes)
dc.relation.ispartofsjr0,241
dc.rights.accessRightsAcesso aberto
dc.sourceWeb of Science
dc.titleAmorphous hydrogenated carbon films treated by SF(6) plasmaen
dc.typeTrabalho apresentado em evento
dcterms.licensehttp://iopscience.iop.org/1367-2630/page/NJP%20copyright%20statement
dcterms.rightsHolderIop Publishing Ltd
unesp.author.lattes0406258050385008
unesp.author.lattes0400554449253191
unesp.author.lattes1946509801000450
unesp.author.lattes9585258374949244
unesp.campusUniversidade Estadual Paulista (Unesp), Faculdade de Engenharia, Guaratinguetápt
unesp.departmentFísica e Química - FEGpt

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Guaratinguetá - FEG - Faculdade de Engenharia e Ciências