Effect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor method

dc.contributor.authorGonzález, A. H.M. [UNESP]
dc.contributor.authorSimões, A. Z. [UNESP]
dc.contributor.authorZaghete, M. A. [UNESP]
dc.contributor.authorVarela, J. A. [UNESP]
dc.contributor.institutionUniversidade Estadual Paulista (UNESP)
dc.date.accessioned2022-04-29T08:47:21Z
dc.date.available2022-04-29T08:47:21Z
dc.date.issued2004-05-10
dc.description.abstractLithium tantalate (LiTaO3) thin films with (50:50) stoichiometry were prepared using polymeric organic solution. The 5-layered films were deposited on silicon (100) substrates by spin coating method. The coated substrates were thermally treated at 500°C for 3 h under several oxygen atmospheres in order to study the influence of oxygen flow on the crystallinity, microstructure, grain size and roughness of the final film. X-ray diffraction results showed that an oxygen flow of 100 cm3/min leads to LiTaO 3 thin films with higher crystallinity, without preferential orientation. It was observed by scanning electron microscopy (SEM) that the thickness of thin films decreases when the oxygen flow increases. The atomic force microscopy (AFM) studies showed that the grain size and roughness are strongly influenced by oxygen flow.en
dc.description.affiliationUniversidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao Paulo
dc.description.affiliationUnespUniversidade Estadual Paulista, Rua Prof. Francisco Degni s/n, Araraquara CEP 14801-970 Sao Paulo
dc.format.extent69-76
dc.identifier.citationCeramic Transactions, v. 154, p. 69-76.
dc.identifier.scopus2-s2.0-2142769575
dc.identifier.urihttp://hdl.handle.net/11449/231763
dc.language.isoeng
dc.relation.ispartofCeramic Transactions
dc.sourceScopus
dc.titleEffect of oxygen atmosphere on the morphology of LiTaO3 thin films prepared from polymeric precursor methoden
dc.typeTrabalho apresentado em evento

Arquivos