Study of the fabrication of pedestal based-optical waveguides for applications in nonlinear optics

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dc.contributor.authorSierra, Julian H.
dc.contributor.authorCarvalho, Daniel O. [UNESP]
dc.contributor.authorGamero, Vanessa J.
dc.contributor.authorAbe, Igor Y.
dc.contributor.authorAlayo, Marco I.
dc.contributor.institutionUniversidade de São Paulo (USP)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2019-10-06T15:34:37Z
dc.date.available2019-10-06T15:34:37Z
dc.date.issued2019-01-11
dc.description.abstractIn this work we present the details regarding the fabrication process of pedestal based optical waveguides, using different materials with large optical nonlinearities as core layer. With the pedestal fabrication process it is possible to use novel materials that are highly inert to chemical etchants or alloys composed of heavy metal elements, since this technique does not require etching of the core material itself. Lateral confinement of light is performed through the fabrication of pedestals by Reactive Ion Etching (RIE) on the lower cladding. The last step in the fabrication process is the deposition of the core layer and, for this reason, etching this layer is no longer necessary. The materials used as core layer are Aluminum Nitride and Titanium oxynitride films, due to the fact that these materials present a great potential for the fabrication of Nonlinear Optics integrated devices.en
dc.description.affiliationElectronic Systems Engineering Department University of São Paulo (USP)
dc.description.affiliationTelecommunications Department São Paulo State University (UNESP)
dc.description.affiliationUnespTelecommunications Department São Paulo State University (UNESP)
dc.identifierhttp://dx.doi.org/10.1109/SBFoton-IOPC.2018.8610938
dc.identifier.citation2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018.
dc.identifier.doi10.1109/SBFoton-IOPC.2018.8610938
dc.identifier.scopus2-s2.0-85061957722
dc.identifier.urihttp://hdl.handle.net/11449/187387
dc.language.isoeng
dc.relation.ispartof2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018
dc.rights.accessRightsAcesso restrito
dc.sourceScopus
dc.subjectaluminum nitride
dc.subjectnonlinear optics
dc.subjectPedestal waveguide
dc.subjecttitanium oxynitride
dc.titleStudy of the fabrication of pedestal based-optical waveguides for applications in nonlinear opticsen
dc.typeTrabalho apresentado em evento

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