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Dielectric and ferroelectric properties of PZT and PT thin films for saw sensors applications

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dc.contributor.authorShibatta-Kagesawa, S. T. [UNESP]
dc.contributor.authorAraújo, E. B. [UNESP]
dc.contributor.authorOki, N. [UNESP]
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:21:14Z
dc.date.available2014-05-27T11:21:14Z
dc.date.issued2004-12-01
dc.description.abstractIt is very important for the building of the SAW devices to study dielectric and ferroelectrics properties because every SAW device is based in piezoelectric effect that it is made up to transform an electric sign in the mechanical or acoustic sign and a mechanical or acoustic sign in an electric sign. Thus, the purpose of the present work is to prepare PbZr 0,53Ti0.47O3 (PZT) and PbTiO3 (PT) thin films on the Si (100) substrates across spin-coating using a chemical method based in polymeric precursors. After conventional treatment in the furnace, the films were characterized by impedance spectroscopy and hysteresis loops to know its dielectric and ferroelectric properties.en
dc.description.affiliationUniversidade Estadual Paulista Depto. de Engenharia Elétrica, Caixa Postal 31, 15385-000 Ilha Solteira, SP
dc.description.affiliationUniversidade Estadual Paulista Depto. de Fis. e Química, Caixa Postal 31, 15385-000 Ilha Solteira, SP
dc.description.affiliationUnespUniversidade Estadual Paulista Depto. de Engenharia Elétrica, Caixa Postal 31, 15385-000 Ilha Solteira, SP
dc.description.affiliationUnespUniversidade Estadual Paulista Depto. de Fis. e Química, Caixa Postal 31, 15385-000 Ilha Solteira, SP
dc.format.extent319-324
dc.identifier.citationProceedings - Electrochemical Society, v. 3, p. 319-324.
dc.identifier.lattes6725982228402054
dc.identifier.lattes1525717947689076
dc.identifier.scopus2-s2.0-17044364352
dc.identifier.urihttp://hdl.handle.net/11449/68062
dc.language.isoeng
dc.relation.ispartofProceedings - Electrochemical Society
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectCapacitors
dc.subjectCarboxylic acids
dc.subjectFerroelectric materials
dc.subjectLead compounds
dc.subjectMicrosensors
dc.subjectPolyethylene glycols
dc.subjectShear waves
dc.subjectSilicon
dc.subjectSolutions
dc.subjectStoichiometry
dc.subjectTitanium compounds
dc.subjectChemical methods
dc.subjectHysteresis loops
dc.subjectMechanical energy
dc.subjectPiezoelectric substrates
dc.subjectThin films
dc.titleDielectric and ferroelectric properties of PZT and PT thin films for saw sensors applicationsen
dc.typeTrabalho apresentado em evento
unesp.author.lattes6725982228402054
unesp.author.lattes1525717947689076
unesp.campusUniversidade Estadual Paulista (Unesp), Faculdade de Engenharia, Ilha Solteirapt
unesp.departmentEngenharia Elétrica - FEISpt
unesp.departmentFísica e Química - FEISpt

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Ilha Solteira - FEIS - Faculdade de Engenharia