Foundry Polymer-Based Inverted-Rib Waveguides
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Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.
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optical device fabrication, optical polymers, optical resonators
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Inglês
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2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018.
