Publicação: Foundry Polymer-Based Inverted-Rib Waveguides
| dc.contributor.author | Malheiros-Silveira, G. N. [UNESP] | |
| dc.contributor.author | Finardi, C. A. | |
| dc.contributor.author | Van Etten, E. A.M.A. | |
| dc.contributor.author | Burger, T. S. | |
| dc.contributor.author | Da Silva, R. C.G. | |
| dc.contributor.author | Daltrini, A. M. | |
| dc.contributor.author | Panepucci, R. R. | |
| dc.contributor.institution | Centro de Tecnologia da Informação (CTI) Renato Archer | |
| dc.contributor.institution | Universidade Estadual Paulista (Unesp) | |
| dc.contributor.institution | CEITEC S.A Semiconductors | |
| dc.date.accessioned | 2019-10-06T15:34:45Z | |
| dc.date.available | 2019-10-06T15:34:45Z | |
| dc.date.issued | 2019-01-11 | |
| dc.description.abstract | Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented. | en |
| dc.description.affiliation | Centro de Tecnologia da Informação (CTI) Renato Archer | |
| dc.description.affiliation | Universidade Estadual Paulista (UNESP) Câmpus Experimental de São | |
| dc.description.affiliation | CEITEC S.A Semiconductors | |
| dc.description.affiliationUnesp | Universidade Estadual Paulista (UNESP) Câmpus Experimental de São | |
| dc.identifier | http://dx.doi.org/10.1109/SBFoton-IOPC.2018.8610902 | |
| dc.identifier.citation | 2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018. | |
| dc.identifier.doi | 10.1109/SBFoton-IOPC.2018.8610902 | |
| dc.identifier.scopus | 2-s2.0-85061980925 | |
| dc.identifier.uri | http://hdl.handle.net/11449/187392 | |
| dc.language.iso | eng | |
| dc.relation.ispartof | 2018 SBFoton International Optics and Photonics Conference, SBFoton IOPC 2018 | |
| dc.rights.accessRights | Acesso restrito | |
| dc.source | Scopus | |
| dc.subject | optical device fabrication | |
| dc.subject | optical polymers | |
| dc.subject | optical resonators | |
| dc.title | Foundry Polymer-Based Inverted-Rib Waveguides | en |
| dc.type | Trabalho apresentado em evento | |
| dspace.entity.type | Publication |