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Fabrication and characterization of GeO2-PbO optical waveguides

dc.contributor.authorCacho, V. D D
dc.contributor.authorKassab, L. R P [UNESP]
dc.contributor.authorDos Santos, A. D.
dc.contributor.authorSiarkowski, A. L.
dc.contributor.authorDa Silva, D. M.
dc.contributor.authorMorimoto, N. I.
dc.contributor.institutionUniversidade de São Paulo (USP)
dc.contributor.institutionUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:24:04Z
dc.date.available2014-05-27T11:24:04Z
dc.date.issued2009-12-01
dc.description.abstractThis work presents studies of GeO2-PbO thin films deposited by RF Sputtering for fabrication of rib-waveguide. GeO2-PbO vitreous targets were prepared melting the reagents in alumina crucible. Thin films were deposited at room temperature using pure Ar plasma, at 5 mTorr pressure and RF power of 40 W on substrates of (100) silicon wafers. Rutherford Backscattering Spectroscopy (RBS) analyses were employed for the determination of the chemical elements present in the GeO2-PbO film. Geometry and sidewall of the waveguides were investigated by Scanning Electron Microscopy (SEM). The mode propagation in the waveguide structure of GeO2-PbO thin films was analyzed using an integrated optic simulation software to obtain a monomode propagation. © The Electrochemical Society.en
dc.description.affiliationDepartamento de Engenharia de Sistemas Eletrônicos Escola Politécnica Universidade de São Paulo, São Paulo, SP
dc.description.affiliationLaboratório de Vidros e Datação Faculdade de Tecnologia de São Paulo CEETEPS/UNESP, São Paulo, SP
dc.description.affiliationLaboratório de Materiais Magnéticos Instituto de Fisica Universidade de São Paulo, São Paulo, SP
dc.description.affiliationUnespLaboratório de Vidros e Datação Faculdade de Tecnologia de São Paulo CEETEPS/UNESP, São Paulo, SP
dc.format.extent507-513
dc.identifierhttp://dx.doi.org/10.1149/1.3183757
dc.identifier.citationECS Transactions, v. 23, n. 1, p. 507-513, 2009.
dc.identifier.doi10.1149/1.3183757
dc.identifier.issn1938-5862
dc.identifier.issn1938-6737
dc.identifier.scopus2-s2.0-74549185201
dc.identifier.urihttp://hdl.handle.net/11449/71312
dc.language.isoeng
dc.relation.ispartofECS Transactions
dc.relation.ispartofsjr0,225
dc.relation.ispartofsjr0,225
dc.rights.accessRightsAcesso aberto
dc.sourceScopus
dc.subjectAlumina crucible
dc.subjectAr plasmas
dc.subjectMode propagation
dc.subjectRf-power
dc.subjectRf-sputtering
dc.subjectRoom temperature
dc.subjectSEM
dc.subjectSimulation software
dc.subjectWaveguide structure
dc.subjectChemical elements
dc.subjectComputer software
dc.subjectMicroelectronics
dc.subjectRutherford backscattering spectroscopy
dc.subjectScanning electron microscopy
dc.subjectSemiconducting silicon compounds
dc.subjectSilicon wafers
dc.subjectThin films
dc.subjectWaveguides
dc.titleFabrication and characterization of GeO2-PbO optical waveguidesen
dc.typeTrabalho apresentado em evento
dcterms.licensehttp://www.electrochem.org/dl/support/assets/crtf.pdf
dspace.entity.typePublication

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