Foundry Polymer-Based Inverted-Rib Waveguides
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Data
2018-01-01
Autores
Malheiros-Silveira, G. N. [UNESP]
Finardi, C. A.
Van Etten, E. A. M. A.
Burger, T. S.
Silva, R. C. G. da
Daltrini, A. M.
Panepucci, R. R.
IEEE
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Editor
Ieee
Resumo
Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented.
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optical device fabrication, optical polymers, optical resonators
Como citar
2018 Sbfoton International Optics And Photonics Conference (sbfoton Iopc). New York: Ieee, 3 p., 2018.